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Multilayer magnetic core film based on amorphous CoNiFe and preparation method thereof

An amorphous and magnetic core technology, applied in the field of multilayer magnetic core film and its preparation, can solve the problems of non-magnetic insulating oxides, unfavorable film soft magnetic properties, reducing material saturation magnetization, etc., and achieve high saturation magnetization , high anisotropy field, the effect of improving resistivity

Active Publication Date: 2022-06-28
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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Problems solved by technology

However, since the insulating oxide is not magnetic, the introduction of the insulating layer further reduces the saturation magnetization of the material, which is not conducive to the soft magnetic properties of the film at high frequencies.

Method used

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  • Multilayer magnetic core film based on amorphous CoNiFe and preparation method thereof
  • Multilayer magnetic core film based on amorphous CoNiFe and preparation method thereof
  • Multilayer magnetic core film based on amorphous CoNiFe and preparation method thereof

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Embodiment

[0030] A preparation method of a multilayer magnetic core film based on amorphous CoNiFe, specifically comprising the following steps:

[0031] Step 1. Wash the silicon substrate with acetone and alcohol in turn to remove organic matter, then ultrasonically oscillate in deionized water for 5 min, and dry with nitrogen for use;

[0032] Step 2. Use magnetron sputtering to prepare an amorphous CoNiFe magnetic layer on the silicon substrate cleaned in step 1:

[0033] Place the cleaned silicon substrate substrate and target in step 1 in a magnetron sputtering chamber, where the target is Co 65 Ni 12 Fe 23 Alloy target, the diameter of the target is 74mm, and it is a 3-inch target; Argon gas is introduced into the magnetron sputtering chamber, and the sputtering power is 0.25W / cm 2, Under the condition of sputtering gas pressure of 0.13Pa, magnetron sputtering method was used to prepare amorphous CoNiFe magnetic layer with thickness of 50-200nm; during sputtering, anisotropic f...

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Abstract

The invention discloses a multi-layer magnetic core film based on amorphous CoNiFe. The multi-layer magnetic core film is obtained by alternately sputtering amorphous CoNiFe magnetic layers and CoNiFeO oxidation insulating layers, the amorphous CoNiFe magnetic layer is obtained by adopting Co (65-68) Ni (12-14) Fe (18-23) alloy as a target material and adopting a magnetron sputtering method under the conditions that the sputtering power is 0.1-0.5 W / cm < 2 > and the sputtering air pressure is 0.02-1.2 Pa; and the CoNiFeO oxidation insulating layer is obtained by oxidizing the amorphous CoNiFe magnetic layer by introducing oxygen. According to the method, the amorphous film is obtained under the combined action of the target material in a specific proportion and the technological parameters of magnetron sputtering. Compared with an existing mode of adding non-magnetic elements to form an amorphous thin film, high saturation magnetization intensity and a high anisotropic field are better obtained, and application of the magnetic core film under high frequency is facilitated.

Description

technical field [0001] The invention relates to a multilayer magnetic core film suitable for high-frequency thin film inductors, transformers, etc. and a preparation method thereof, in particular to a multilayer magnetic core film based on amorphous CoNiFe and a preparation method thereof. Background technique [0002] The development of soft magnetic materials is closely related to the development of people's living conditions, and its development has gone through several different stages. (1) Silicon steel sheet is a commonly used soft magnetic material, which is mainly used for motors and low-frequency transformers. (2) Permalloy, that is, an iron-nickel alloy, has a wide range of nickel content, between 35% and 90%, and has a high magnetic permeability under a weak magnetic field. (3) Soft ferrite, including Mn-Zn, Ni-Zn, etc. Soft ferrite has the characteristics of high permeability, high resistivity, and low loss at high frequencies. In recent years, in terms of ter...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01F10/13H01F41/18C23C14/08C23C14/16C23C14/35C22C45/04
CPCH01F10/132H01F41/183C23C14/0073C23C14/16C23C14/085C23C14/35C22C45/04
Inventor 白飞明康惠迪
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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