Filter line grid with tungsten sputtered on surface and hafnium oxide deposited in micropores and manufacturing method

Abstract

The invention relates to a filter grid with tungsten sputtered on the surface and hafnium oxide deposited in micropores and a manufacturing method, and belongs to the field of X-ray diagnostic imaging equipment. According to the technical scheme adopted by the invention, the high-lead-equivalent glass micro-pore array structure is formed by splicing a plurality of high-lead-equivalent glass micro-pore array units, micro-pore channels are uniformly distributed on the glass micro-pore array units, each glass micro-pore array unit is a regular hexagon with the thickness of 3mm and the side length of d, d is 10-20mm, tungsten is subjected to magnetron sputtering on the upper surface and the lower surface of each glass micro-pore array unit, and a metal tungsten coating with the thickness of 100-200nm is formed. And hafnium oxide is deposited on an atomic layer in the micropore channel to form a hafnium oxide film of 20nm. Compared with a micro-pore array directly manufactured by lead glass as a grid hollow unit block, the grid optical fiber panel manufactured by the invention has better anti-scattering performance, can better improve the image contrast and resolution, and is beneficial to eliminating the influence of a moire phenomenon on the image quality.

Description

technical field [0001] The invention relates to a filter grid for sputtering tungsten on the surface and depositing hafnium dioxide in micropores and a manufacturing method, and belongs to the field of X-ray diagnostic imaging equipment. Background technique [0002] Anti-scatter grids are widely used in X-ray imaging to enhance image quality. X-rays emitted from a point source pass through the patient or object and are then detected in a suitable X-ray detector. X-ray imaging works by detecting the intensity of X-rays at locations on an X-ray detector. Darker regions with less light intensity correspond to regions of higher density or greater thickness in the object, while lighter regions with greater light intensity correspond to regions of lower density or thickness in the object. This method relies on X-rays passing through the object or being absorbed. However, X-rays may also undergo scattering processes, mainly Compton scattering, in the patient or object. These s...

AI Technical Summary

Problems solved by technology

[0007] At present, it has not yet involved a manufacturing method using high-lead-equivalent glass microhole array technology, magnetron sputtering tungsten on the surface, and atomic layer deposition of hafnium dioxide in the micropore channel to produce a large-area focused X-ray anti-scattering filter line grid

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