Optical gyroscope double-layer SiN-based integrated driving chip

Abstract

The embodiment of the invention discloses a double-layer SiN-based integrated driving chip of an optical gyroscope. A first implementation structure of the chip comprises a first optical fiber-SiN waveguide coupler, a second optical fiber-SiN waveguide coupler, a first 3dB beam splitter, a polarizer, a second 3dB beam splitter, a first interlayer vertical coupler, a second interlayer vertical coupler, a first phase shifter, a second phase shifter, a third interlayer vertical coupler and a fourth interlayer vertical coupler. A third optical fiber-SiN waveguide coupler; and a fourth optical fiber-SiN waveguide coupler. According to the invention, good expandability of the SiN photon platform and excellent electro-optical modulation performance of the electro-optical material are combined, the SiN waveguide at the upper layer can realize low-loss optical transmission, beam splitting and polarization on the whole chip, and the electro-optical phase shifter at the lower layer can be integrated with the whole set of SiN photon assembly. Therefore, the provided chip architecture is very suitable for applications such as fiber-optic gyroscopes and the like.

Description

technical field [0001] The invention relates to the technical field of integrated optics and inertial sensing, in particular to an optical gyro double-layer SiN-based integrated driving chip. Background technique [0002] As an angular velocity sensor, fiber optic gyroscopes have significant advantages over traditional mechanical gyroscopes in measurement accuracy, sensitivity and reliability, and are widely used in positioning, attitude control, and absolute direction measurement. According to the division of measurement accuracy, high-precision fiber optic gyroscopes are mainly used in the fields of space technology, military applications and scientific research, while low-cost medium and low-precision fiber optic gyroscopes are widely used in many civil fields such as automobile navigation, positioning and attitude control, and robotics. application scenarios. [0003] Fiber optic gyroscopes generally realize the generation, modulation and detection of optical signals ba...

AI Technical Summary

Problems solved by technology

At present, the integrated phase shifter widely used in the fiber optic gyro system is mainly realized based on the electro-optical effect in the bulk lithium niobate waveguide, but the traditional LiNbO based on the proton diffusion process 3 The waveguide has some disadvantages: (1) The lower refractive index difference between the waveguide and the cladding leads to weaker optical field confinement, which requires a large distance between the metal electrode and the waveguide, thereby reducing the electro-optic modulation efficiency; (2) There are strict requirements on the time and temperature of proton exchange, the characteristics of the exchange medium and the temperature and time of annealing, the preparation process is complicated and the cost is high

However, SiN has no second-order nonlinear effect (thus lacking the linear electro-optic effect), the third-order nonlinear effect is weak, and it does not support electronic doping, so efficient and fast electro-optic modulation cannot be achieved

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