High-speed communication low-dielectric substrate for millimeter waves
A high-speed communication, low-dielectric technology, applied in circuit substrate materials, printed circuits, circuit devices, etc., can solve the problems of decreased strength, increased strain, and has not been practically applied, and achieves stable quality and reduced characteristic differences. Effect
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[0137] Hereinafter, although an Example and a comparative example are used and this invention is demonstrated concretely, this invention is not limited to these.
[0138] In addition, the measurement of the following characteristic values (tensile strength, loss factor (tan δ), dielectric constant, average particle diameter) was performed according to the following methods unless otherwise specified.
[0139] 1. Determination of tensile strength
[0140] Measured in accordance with "7.4 Tensile Strength" in Japanese JIS R3420:2013 "General Test Methods for Glass Fibers".
[0141] 2. Determination of loss factor
[0142] 2.1 Glass cloth, organic resin, resin substrate
[0143] Unless otherwise specified, a network analyzer (manufactured by Keysight Technologies, E5063A) was connected to an SPDR resonator (split column dielectric resonator), and the loss factor of the sample at a frequency of 10 GHz was measured.
[0144] 2.2 Silica powder
[0145] (1) A varnish was prepar...
preparation example 1
[0157] (Production Example 1: Production Example of Quartz Glass Cloth (SG1))
[0158] Quartz glass filaments were stretched at a high temperature and simultaneously coated with a sizing agent for quartz glass fibers, thereby producing a quartz glass strand consisting of 200 quartz glass filaments having a diameter of 7.0 μm. Next, the obtained quartz glass strand was twisted 0.2 times per 25 mm to prepare a quartz glass yarn.
[0159] The obtained quartz glass yarn was loaded into an air-jet loom, and a plain-woven quartz glass cloth having a warp density of 60 threads / 25 mm and a weft density of 58 threads / 25 mm was woven. The thickness of the quartz glass cloth is 0.0086mm, and the weight per unit area of the cloth is 85.5g / m 2 .
[0160] This quartz glass cloth was heat-treated at 400° C. for 10 hours to remove the fiber sizing agent. In addition, the quartz glass cloth with a width of 1.3 m and a length of 2000 m produced in Preparation Example 1 was referred to as S...
preparation example 2
[0161] (Production Example 2: Production Example of (SG2))
[0162] The quartz glass cloth with a width of 1.3 m and a length of 2000 m produced in Preparation Example 1 was placed in an electric furnace set at 700° C. and heated for 5 hours. After heating, it was cooled to room temperature over 8 hours.
[0163] Next, the above-mentioned quartz glass cloth was immersed in alkaline electrolyzed water of pH 13 heated to 40° C. for 48 hours to perform etching treatment. After etching, it was washed with ion-exchanged water and dried to produce a low-dielectric and high-strength quartz glass cloth (SG2). The dielectric constant of the quartz glass cloth SG2 was 3.3, the loss factor was 0.0002 and the tensile strength was 105N / 25mm.
[0164] (Metal impurities contained in the quartz glass cloths manufactured in Preparation Examples 1 to 2 and treatment with a silane coupling agent)
[0165] The alkali metals in the quartz glass cloths of SG1 and SG2 were both 0.5 ppm, P (phosph...
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