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Angle sensor and manufacturing process thereof

An angle sensor and manufacturing process technology, applied in the field of magnetic field sensors, can solve problems such as low precision and sensitivity, difficult angle measurement, and large volume, and achieve the effects of simple operation, easy mass production, and miniaturization

Pending Publication Date: 2022-08-05
HEILONGJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, the existing electrical angle sensors are difficult to measure angles in the range of 0 to 360°. Even if this range can be achieved, there are still disadvantages such as large volume, low precision and low sensitivity, and the limitations of the application field are relatively large.

Method used

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  • Angle sensor and manufacturing process thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach

[0080] According to a preferred embodiment of the present invention, the rotor 1 is a disc structure, and a circular through slot is opened in the center to be nested and connected to the stator base,

[0081] The edge of the rotor 1 is a tooth-like structure.

[0082] In a further preferred embodiment, the rotor 1 is provided with small rotor magnets 4 , there are two small rotor magnets, and the two are distributed along the diameter of the rotor 1 and symmetrically distributed with respect to the center of the rotor 1 .

[0083] Wherein, the small rotor magnets are arranged in the disc plate surface of the rotor 1 .

[0084] Preferably, the two small rotor magnets are arranged in the same direction of magnetic sensitivity.

[0085] In the present invention, the two small rotor magnets generate a uniform magnetic field in the horizontal direction, which is applied to the first magnetic sensitive unit.

[0086] More preferably, the rotor is made of a wear-resistant resin ma...

Embodiment 1

[0187] (1) Make the magnetic sensitive unit of the angle sensor according to the following steps:

[0188] Step 1, zero-shot lithography, dry etching the silicon wafer registration mark.

[0189] Step 2, cleaning the silicon wafer, performing the first oxidation by thermal oxidation, and growing a thin oxygen layer on one side of the upper surface of the silicon wafer with a thickness of 30 nm.

[0190] Wherein, the silicon wafer is a crystal orientation p-type single crystal silicon wafer, the thickness of a 4-inch wafer is 500 μm, and the resistivity is 0.1 Ω·cm.

[0191] The cleaning of the silicon wafer adopts the RCA standard cleaning method.

[0192] Step 3, the first photolithography, the ion implantation window is formed, and phosphorus ions are implanted on the upper surface of the silicon wafer to form the magnetic sensitive area of ​​the Hall element and four diffusion resistors.

[0193] Among them, the magnetic sensitive area and the four diffusion resistances ...

experiment example 1

[0215] Using a magnetic field generator (recommended model of Beijing Cuihai Jiacheng Magnetoelectric Technology Co., Ltd.: CH Hall-300, which can generate a magnetic field of 1Gs ~ 1T), a stepping motor drive controller (CH-400B), a program-controlled power current source (CH-HallModel F2030), full digital high-resolution Tesla meter (CH-1600), programmable linear DC power supply (RIGOLDP832A) from Suzhou Puyuan Precision Technology Co., Ltd. and data collector (Agilent 34410A) and other instruments to test the magnetic properties of the magnetic sensitive unit of the angle sensor prepared in Example 1.

[0216] Specifically, under the condition of room temperature (300K), the magnetic sensitive unit of the angle sensor is placed in the magnetic field environment of the test system, and the power supply voltage V DD = 5.0V, the rotation angle range is 0°~360°, and the rotation step is 1° (adjust the magnetic field size to 5.0mT, 10.0mT, 15.0mT respectively), and test the char...

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Abstract

The invention discloses an angle sensor and a manufacturing process thereof.The angle sensor comprises a rotor (1) and a stator base (2) which are arranged in a nested mode, a sensor protection plate (3) is arranged on the upper surface of the rotor (1), a magnetic sensitive unit is arranged in the center of the stator base (2), and the rotor (1) surrounds the stator base with the magnetic sensitive unit as the center; and 360-degree rotation is realized. The first magnetic sensing unit takes a multilayer film giant magnetoresistor as a main magnetic sensing element, and the second magnetic sensing unit is a Hall element. According to the manufacturing process of the angle sensor disclosed by the invention, the packaging of the sensor is realized by combining a microelectronic process with a magnetron sputtering method and combining a 3D printing technology, the operation is simple, the miniaturization of the sensor can be realized, the batch production is easy, and the manufacturing process has a good application prospect in the aspects of an automobile steering system, wind speed measurement, flow velocity measurement and the like.

Description

technical field [0001] The invention relates to the technical field of magnetic field sensors, in particular to an angle sensor and a manufacturing process thereof. Background technique [0002] The angle sensor is a kind of sensor that can be installed on the machine equipment to obtain the real-time rotation angle of the machine. It has a very wide range of applications in modern industrial and electronic products such as ships, vehicles, tunnels, machinery, medical equipment, and geophysical instruments. [0003] At present, with the development of the industry and the advancement of technology, angle sensors are constantly tending to be miniaturized and integrated. The angle sensor is divided into contact type and non-contact type. Among them, the contact type angle sensor is not only easy to wear and easy to produce errors due to the mechanical contact during measurement, and has been gradually replaced by the non-contact type angle sensor. Common non-contact angle sen...

Claims

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Application Information

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IPC IPC(8): G01B7/30
CPCG01B7/30
Inventor 赵晓锋李航艾春鹏温殿忠
Owner HEILONGJIANG UNIV
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