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Making process of miniature unsym-dimethylhydrazine gas sensor with temperature and humidity compensation function

A temperature and humidity compensation, gas sensor technology, applied in the sensor field, can solve the problems of propellant leakage, cannot be used normally, and the electrochemical sensor has a great influence, and achieves good performance and meets the requirements.

Inactive Publication Date: 2004-10-06
NO 49 ELECTRONICS INST INFORMATION IND MINIST +1
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Problems solved by technology

[0004] In order to solve the propellant leakage detection problem during the launch process of the launch vehicle, the existing electrochemical sensor is greatly affected by the ambient temperature and humidity, and cannot be used normally in the field work environment and transportation work environment in winter. Slightly biased dimethylhydrazine gas sensor with temperature and humidity compensation function

Method used

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  • Making process of miniature unsym-dimethylhydrazine gas sensor with temperature and humidity compensation function
  • Making process of miniature unsym-dimethylhydrazine gas sensor with temperature and humidity compensation function
  • Making process of miniature unsym-dimethylhydrazine gas sensor with temperature and humidity compensation function

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Embodiment Construction

[0023] refer to Figure 1-2 , completed by microelectronic machining technology, 1 is the substrate, 2 is the insulating dielectric isolation layer (I), refer to Figure 3-4 , in the present embodiment, metal thin film heater 3 can be metals such as nickel, chromium, tantalum; 4 is dielectric isolation layer (II), is silicon nitride, nitrogen pentoxide, with reference Figure 5 , gold is used as the metal film electrode 5 in this embodiment, Figure 6 For the deposition of thin films 6 sensitive to unsymmetrical dimethylhydrazine gas, Figure 7 For the schematic diagram of temperature and humidity compensation, Figure 8 A block diagram of the overall process. Figure 9 , 10 respectively represent the schematic diagram of the temperature and humidity compensation circuit.

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Abstract

The present invention belongs to the field of sensor. The making process of miniature unsym-dimethylhydrazine gas sensor with temperature and humidity compensation function includes: depositing the first insulating medium isolating layer on the substrate; sputtering metal film electrode, laser etching figure to make the metal film heater; depositing the second insulating medium isolating layer on the metal film heater; sputtering metal film electrode; depositing unsym-dimethylhydrazine sensitive film between the electrodes; regulating resistance with laser, sputtering compact glass film and sputtering molecular sieve film. Owing to the temperature and humidity compensation function, the gas sensor has excellent performance to meet the requirement of carrier rocker even if in harsh environment condition.

Description

technical field [0001] The invention belongs to the field of sensors, in particular to a method for manufacturing a slightly biased dimethylhydrazine gas sensor with a temperature and humidity compensation function. Background technique [0002] A sensor is a device or device that senses a specified measured object and converts it into an output signal according to a certain rule. In a modern control system, the sensor is at the interface between the measured object and the test system, and constitutes the main window for system information input. It has a unique position for the development of basic science and high technology, because the obstacle of many basic scientific research is that it is difficult to obtain object information, and the emergence of some new mechanisms and high-sensitivity and high-function detection sensors will make related technologies achieve breakthroughs progress. Foreign experts commented that if there were no sensors to detect various informa...

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Application Information

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IPC IPC(8): G01N27/30G01N27/31
Inventor 张洪泉范茂军唐祯安
Owner NO 49 ELECTRONICS INST INFORMATION IND MINIST
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