Polishing composition for polishing surface of memory, hard disk and magnetic head and its polihsing method
A technology of polishing composition and memory, which is applied in the direction of polishing composition containing abrasives, chemical instruments and methods, and other chemical processes, which can solve the problems of surface material corrosion and scratching, and achieve the effect of low surface roughness
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[0019] Polishing composition embodiment of the present invention is described in detail as follows:
[0020] (1) Abrasives
[0021] Among the components of the polishing composition of the present invention, suitable primary abrasives are selected from nanoscale diamond, silica, alumina, ceria, titania, silicon nitride, zirconia and manganese dioxide. The abrasive is not limited to any particular one of these abrasives.
[0022] Diamond includes diamond or diamond-like powder crushed from type I, II, III and IV diamond materials and mixtures of four types of diamond powder in different proportions, as well as diamond or diamond-like powder crushed by various methods. It also includes various diamond or diamond-like powders produced by detonation.
[0023] Silica includes colloidal silica, fumed silica, and many other types of silica that differ in their preparation methods or properties.
[0024] In addition, alumina includes α-alumina, δ-alumina, θ-alumina, κ-alumina, and ...
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