Wide-band low-loss semiconductor saturable absorbing mirror for mode-locking laser
A saturable absorption, mode-locked laser technology, applied in the field of broadband low-loss semiconductor saturable absorption mirrors, can solve the problems of low output power, large loss of saturable absorption mirrors, and high threshold of mode-locked lasers, and achieve the effect of narrow pulse width
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[0016] image 3 It is a schematic diagram of the vertical cross-section structure of a semiconductor saturable absorbing mirror inserted into a transparent medium layer and a high-reflection film designed according to the present invention. For the sake of brevity in describing the fabrication process, the supporting substrate is temporarily ignored. And only take the fabrication of a broadband semiconductor saturable absorber mirror with a central wavelength of 800 nanometers as an example for illustration.
[0017] [1] The saturable absorber 5 is an InGaAs quantum well. grown on a lattice-matched GaAs substrate. In order to make the quantum well at the peak of the standing wave field of the film system, transparent semiconductor materials AlGaAs4 and 6 are used as transition layers. In order to ensure the smoothness and uniformity of the semiconductor surface after etching, a selective etching method must be used, that is, a stop layer is required, and the material of the...
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