Micro liquid drop driver based on power-on wetting of medium layer

Abstract

The present invention discloses one kind of micro liquid drop driver based on electric wetting on medium layer and belongs to the field of micro complete analysis system and micro electromechanical system. On monocrystal silicon, there are one lower plate substrate layer of hot oxide SiO2, one Ti / Pt electrode array, one thin film medium layer, one hydrophobic layer of fluorocarbon polymer, and upper plate glass sheet with hydrophobic layer and ITO and supported with some support, successively. The micro liquid drop driver has low micro liquid drop driving voltage, simple making process and low cost, and other liquid drop operation may be further integrated on the same chip.

Description

Technical field [0001] The invention belongs to the range of micro total analysis system and micro electromechanical system, and particularly relates to a micro droplet driver based on electrowetting on a dielectric layer. Background technique [0002] Since Manz and Widmer first proposed the concept of a miniaturized total analysis system (μTAS) in the early 1990s, it has developed into one of the most cutting-edge scientific and technological fields in the world in just over ten years. The purpose of μTAS is to maximize the transfer of the functions of the analysis laboratory to portable analysis equipment through the miniaturization and integration of chemical analysis equipment, and even integrate it on a square-inch chip. Therefore, μTAS is also known as laboratory-on-chip (LOC). At present, μTAS has broad application prospects in chemical analysis, biochemical detection, drug delivery, molecular separation, nucleic acid molecule amplification, sequencing or synthesis, envir...

AI Technical Summary

Problems solved by technology

However, the disadvantages of the continuous flow system are: (1) due to the direct contact between the electrode and the solution, some electrochemical reactions will occur; (2) devices such as micropumps and microvalves are required, the manufacturing process is complicated, and the reliability is poor; Reduce the residual liquid in the channel by reducing the channel size, but the "dead zone" phenomenon is inevitable; (4) The continuity of the liquid limits the operation of the liquid, and the interaction between the channels is serious

Because the price of Teflon® AF1600 is very expensive (about 6 times that of gold) and the consumption is relatively large, it will undoubtedly encounter great obstacles in the research of micro-analysis system and the industrialization of lab-on-a-chip

In addition, due to the low dielectric strength of Teflon® AF1600, SiO must be deposited under it first. 2 And other dielectric films, and glass is not resistant to high temperature, the preparation of these dielectric films can only be carried out at a lower temperature, which will inevitably result in a relatively loose structure of the dielectric film and poor insulation performance, resulting in certain leakage and breakdown problems

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