Micro liquid drop driver based on power-on wetting of medium layer

A technology of micro-droplets and drivers, applied in the direction of electric solid-state devices, instruments, circuits, etc., can solve the problems of complex manufacturing process, low dielectric strength, and high price, and achieve simple manufacturing process, low droplet driving voltage, and low cost. low effect

Inactive Publication Date: 2005-03-02
TSINGHUA UNIV
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  • Abstract
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  • Application Information

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Problems solved by technology

However, the disadvantages of the continuous flow system are: (1) due to the direct contact between the electrode and the solution, some electrochemical reactions will occur; (2) devices such as micropumps and microvalves are required, the manufacturing process is complicated, and the reliability is poor; Reduce the residual liquid in the channel by reducing the channel size, but the "dead zone" phenomenon is inevitable; (4) The continuity of the liquid limits the operation of the liquid, and the interaction between the channels is serious
Because the price of Teflon® AF1600 is very expensive (about 6 times th...

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  • Micro liquid drop driver based on power-on wetting of medium layer
  • Micro liquid drop driver based on power-on wetting of medium layer
  • Micro liquid drop driver based on power-on wetting of medium layer

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Embodiment Construction

[0015] The EWOD-based micro-droplet driver proposed according to the present invention will be described in detail with reference to embodiments and drawings as follows:

[0016] The structure of the micro-droplet driver based on EWOD is as figure 1 As shown, this embodiment uses Ti and Pt as the bottom electrode, and the bottom electrode array 3 is connected to the external lead 9. Si deposited by LPCVD 3 N 4 The film serves as the dielectric layer. The droplet 10 of deionized water is sandwiched between two plate electrodes, the upper electrode serves as a ground electrode, and the lower electrode is composed of a plurality of independently controllable microelectrode arrays. Each electrode is square, and the distance between the electrodes is 20 μm. An interdigital structure is used between the two electrodes to make it easier for the droplets to move from one electrode to the other. In order to avoid the contact between the liquid and the electrode and obtain good breakdown c...

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Abstract

The present invention discloses one kind of micro liquid drop driver based on electric wetting on medium layer and belongs to the field of micro complete analysis system and micro electromechanical system. On monocrystal silicon, there are one lower plate substrate layer of hot oxide SiO2, one Ti/Pt electrode array, one thin film medium layer, one hydrophobic layer of fluorocarbon polymer, and upper plate glass sheet with hydrophobic layer and ITO and supported with some support, successively. The micro liquid drop driver has low micro liquid drop driving voltage, simple making process and low cost, and other liquid drop operation may be further integrated on the same chip.

Description

Technical field [0001] The invention belongs to the range of micro total analysis system and micro electromechanical system, and particularly relates to a micro droplet driver based on electrowetting on a dielectric layer. Background technique [0002] Since Manz and Widmer first proposed the concept of a miniaturized total analysis system (μTAS) in the early 1990s, it has developed into one of the most cutting-edge scientific and technological fields in the world in just over ten years. The purpose of μTAS is to maximize the transfer of the functions of the analysis laboratory to portable analysis equipment through the miniaturization and integration of chemical analysis equipment, and even integrate it on a square-inch chip. Therefore, μTAS is also known as laboratory-on-chip (LOC). At present, μTAS has broad application prospects in chemical analysis, biochemical detection, drug delivery, molecular separation, nucleic acid molecule amplification, sequencing or synthesis, envir...

Claims

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Application Information

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IPC IPC(8): B81B7/00
Inventor 岳瑞峰曾雪锋吴建刚胡欢刘理天
Owner TSINGHUA UNIV
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