Apparatus and process of producing electronics level high purity hydrochloric acid

A technology of electronic chemicals and semi-finished products, applied in the direction of chlorine/hydrogen chloride purification, chlorine/hydrogen chloride, etc., can solve the problems of high energy consumption, low output rate, and difficulty in large-scale rectification, and achieve low energy consumption and high output The effect of high efficiency and large-scale production

Inactive Publication Date: 2005-04-27
BEIJING INST OF CHEM REAGENTS
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AI Technical Summary

Problems solved by technology

1. This method has resistance wire tube heating, which consumes a lot of energy. The scale inside the tube will affect the heat transfer efficiency due to the long-term heating on the inner surface, and it is very easy to cause danger.
2. Low output rate
The crude hydrochloric acid is heated in the tower kettle to form an azeotrope of about 36% (the ratio of hydrogen chloride and water is constant) at 112°C. In continuous production, the raw material is continuously added to the tower, and the raffinate is also continuously discharged. The hydrogen chloride in the discharged raffinate is The content is nearly 20%, and the output rate is only about 60%. The discharged residual liquid causes environmental pollution and also brings great burden to environmental protection facilities.
3. It is difficult to form large-scale production by rectification method
The materials used in rectification equipment are glass or quartz, and the heating method determines the scale of the equipment. Most enterprises produce multiple sets of small equipment, and there are few operators, which is a potential hidden danger to safe production.

Method used

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  • Apparatus and process of producing electronics level high purity hydrochloric acid
  • Apparatus and process of producing electronics level high purity hydrochloric acid
  • Apparatus and process of producing electronics level high purity hydrochloric acid

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Embodiment Construction

[0049] The specific embodiment of process of the present invention is as follows

[0050] The pressure of hydrogen chloride gas is 0.15MPa, measured by a mass flow meter ZL-01, and connected with a tee through a regulating valve. The pressure of nitrogen is 0.15MPa and it is connected with the tee. Hydrogen chloride gas and nitrogen gas are mixed in the tee and enter the purification tower T-1. T-1 is filled with coconut shell modified activated carbon. The activated carbon can remove oil and low-carbon organic compounds and iron and copper in the raw material gas. For metal impurities, the working temperature of the tower should be lower than 35°C, otherwise the impurities adsorbed by the activated carbon will be decomposed and enter the next stage, and even the absorption tower will seriously affect the product quality.

[0051] Connections from T-1 to T-6 are made of glass, quartz, and PTFE material. Due to the strict requirements for high-purity reagents, it is strictly ...

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Abstract

The present invention relates to gas absorbing process of producing high purity hydrochloric acid and corresponding production apparatus. By means of the method and apparatus of the present invention, high purity hydrochloric acid as one kind of electronic chemical may be produced directly. The present invention solves the difficult problem of purifying hydrogen chloride gas and realizes the large scale production of high purity hydrochloric acid via gas absorbing process. The product has metal impurity and anion contents meeting the requirement as MOS grade, BV-III grade product standard for VLSI production.

Description

technical field [0001] The invention relates to a production method and a production device of electronic chemical high-purity hydrochloric acid. The electronic chemical high-purity hydrochloric acid produced by it is mainly used in the production of integrated circuits in the microelectronics industry, and can also be used in the production of reagent grade hydrochloric acid. Background technique [0002] At present, the production technology mainly used in the production of high-purity hydrochloric acid for electronic chemicals is rectification. This method has the disadvantages of high energy consumption, low output rate, large waste liquid discharge, and serious environmental pollution. [0003] Most of the methods for producing high-purity hydrochloric acid now are rectification. 1. This method has resistance wire tube heating, which consumes a lot of energy. The internal surface of the tube is heated for a long time to produce scales tha...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B7/01C01B7/07
Inventor 杨晓虹杨长青邹德强
Owner BEIJING INST OF CHEM REAGENTS
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