Ferroelectric thin-membrane phase shifter, detection and optimization for reflection characteristics
A ferroelectric thin film and phase shifter technology, which is applied in phase shifting networks, circuits, electrical components, etc., can solve the problems of strong reflection loss and deterioration of transmission loss, and achieve the goal of reducing reflection loss, improving quality factor, and improving transmission characteristics Effect
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Embodiment 1
[0025] figure 2 and 3 In, transmission line 21L sect1 and transmission line 22L sect2 are part of transmission line 2, keep L sect1 and L sect2 The total length remains the same, changing the clip in L sect1 and L sect2 between the positions of the ferroelectric tunable capacitor 5, that is connected at the L sect1 C at the end BST1 s position. When the ferroelectric tunable capacitor 5C BST1 From a single periodic structure (ie L sect1 =L sect2 ) increase L sect1 When the length of the circuit is viewed from the input end to the right, its input impedance will increase with C BST1 The location of the different, that is to say, the input impedance is L sect1 function. For a phase shifter designed with a double periodic structure, there is an appropriate C BST1 position, that is, the appropriate L sect1 length such that figure 2 China ferroelectric adjustable capacitor 6C BST2 Match the input impedance of the device. Judging from the frequency response char...
Embodiment 2
[0028] image 3 Among them, on the magnesium oxide substrate 1 with an area of 5mm×10mm, the surface is plated with a gold conductive film, and a 300nm-thick barium strontium titanate film is deposited on the area where the adjustable capacitor 5 is formed, a double periodic structure is used. Such as image 3 The layout of the phase shifter structure is shown. Figure 5 It is the frequency response curve of the phase shifter obtained after computer simulation optimization, wherein, S11 is the reflection loss of the phase shifter, and S21 is the transmission loss of the phase shifter. From Figure 5 It can be seen that its operating frequency range extends from DC to 14GHz, and in the entire operating frequency range, the extreme value of its reflection loss is less than -17dB and remains at the same magnitude. In this embodiment, the MgO dielectric constant ε selected by simulation r =9.8, dielectric loss 1.6×10 -6 , the barium strontium titanate thin film deposited on...
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