Method for producing passive micro-mixer and micro-reactor in micro-flow control chip

A microfluidic chip and micro-mixer technology, which is applied in semiconductor/solid-state device manufacturing, instruments, material inspection products, etc., can solve the problems of high requirements for equipment and materials, complex process, etc., and achieve low cost of substrates, The effect of high mechanical strength

Inactive Publication Date: 2006-08-02
NORTHEASTERN UNIV
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

In order to form submicrostructures in micromixing and reaction channels, the existing methods all involve double exposure, and even three exposures are required in order to form microchannels with submicrostructures on three sides in the channel (PDMS microchannels with slanted grooves embedded in three...

Method used

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  • Method for producing passive micro-mixer and micro-reactor in micro-flow control chip
  • Method for producing passive micro-mixer and micro-reactor in micro-flow control chip
  • Method for producing passive micro-mixer and micro-reactor in micro-flow control chip

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Embodiment Construction

[0017] Figure 5 Demonstrates the fabrication process of a Y-shaped micromixer mother glass. The mixer has two material introduction channels, and the main mixing channel has a fishbone submicrostructure. The mask is printed onto polyester film with a laser imagesetter with a resolution of 3000dpi. Commercialized glass substrate with chromium layer and AZ1805 positive photoresist (Changsha Shaoguang Microelectronics Corporation SG2506 type, chrome plate thickness 145nm, glue thickness 550nm), using 100W high-pressure mercury lamp ultraviolet light source, using JKG-2A photolithography machine Type (Shanghai Xueze Optical Machinery Co., Ltd.) exposure for 30 seconds. Shake gently in 0.5% NaOH for 45 seconds, and after 20 minutes in an oven at 110°C, in a chrome-removing solution (70% HClO 4 104ml+(NH 4 ) 2 Ce(NO 3 ) 6 400g+1760ml H 2 O) shake for 2 minutes to remove the exposed chromium protective layer. With 1:2:7 volume ratio of HF-HNO 3 -H 2 O etchant water bath ...

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Abstract

The present invention relates to a method for making passive micromixer and microreactor in microfluidic chip. Said method includes the following steps: firstly, making glass mother die chip whose bottom surface and side surface have submicrostructure, utilizing glass mother plate chip to prepare all-glass chip or all-glass mixed chip whose three faces or all-channel have submicrostructure, or utilizing the process of pouring polymer to obtain the male die complementary with glass mother plate microstructure, utilizing said male die to make secondary pouring and duplication so as to obtain the chip of polymer base material with glass, mother plate structure, then further making packaging combination to obtain all-polymer mixed chip or composite chip.

Description

technical field [0001] The invention relates to the technical field of microfluidic analysis chip testing and the field of microchemical reaction engineering, in particular to a method for manufacturing a passive micromixer and a microreactor in a microfluidic chip. Background technique [0002] The mixing of reagents and materials is the basic condition and operation for analytical testing and chemical reactions of different reactants. Mixing is a spontaneous process that occurs naturally through the method of molecular diffusion. However, the natural mixing efficiency is very low, which is manifested as a long time required or a long running distance, which is difficult to meet the needs. In order to improve efficiency, other methods besides natural mixing need to be introduced for improvement. For macroscopic reactors, mixing can be effectively improved by forced stirring. For flow mixing and reactions in pipes, turbulence is often exploited to improve mixing efficienc...

Claims

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Application Information

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IPC IPC(8): G01N33/48G01N35/00H01L21/00
Inventor 吴志勇方芳张娜徐章润王世立
Owner NORTHEASTERN UNIV
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