Electromagnetic radiation detection device, radiation detection device and system, and laser processing method

A technology for electromagnetic radiation and detection equipment, applied in circuits, electrical components, electrical solid devices, etc., to solve problems such as impossible to repair switching elements, reduction of pixel aperture ratio, and reduction of sensitivity of photoelectric conversion devices.

Inactive Publication Date: 2006-12-20
CANON KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0029] However, there is a problem that when an interlayer insulating layer, a photoelectric conversion element, etc. are formed on a switching element, if it is found to be defective after the switching element is formed, it is impossible to repair the switching element
[0041] However, there are also problems that when an opening is formed in the photoelectric conversion element, the aperture ratio of the pixel decreases and the sensitivity of the photoelectric conversion device decreases

Method used

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  • Electromagnetic radiation detection device, radiation detection device and system, and laser processing method
  • Electromagnetic radiation detection device, radiation detection device and system, and laser processing method
  • Electromagnetic radiation detection device, radiation detection device and system, and laser processing method

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no. 1 approach

[0055] Figure 1A and 1B It is a figure which shows 1st Embodiment of this invention.

[0056] Figure 1A and 1B A front view showing one pixel in the X-ray image pickup apparatus of the first embodiment of the invention ( Figure 1A ) and cross-sectional view ( Figure 1B ). exist Figure 1A and 1B In , for the convenience of describing the present invention, a fluorescent substance serving as a wavelength converter for converting X-rays into light such as visible light, a protective layer on a photoelectric conversion element, and a bonding layer are omitted. In addition, constituent elements similar to those in the related art are denoted by the same reference numerals as in the related art, and their detailed descriptions are omitted.

[0057] Such as Figure 1A and 1B As shown, the present embodiment provides a TFT 416 serving as a switching element on a glass substrate 401 serving as an insulating substrate, and places a photoelectric conversion element 417 on ...

no. 2 approach

[0083] Figure 2A and 2B It is a figure which shows 2nd Embodiment of this invention.

[0084] Figure 2A and 2B A front view showing one pixel in the X-ray image pickup device of the second embodiment of the present invention ( Figure 2A ) and cross-sectional view ( Figure 2B ). exist Figure 2A and 2B In the present invention, for the convenience of describing the present invention, the fluorescent substance for converting X-rays into visible light, the protective layer and the bonding layer on the photoelectric conversion element are omitted.

[0085] In this embodiment, constituent elements that perform the same functions as those in the first embodiment are denoted by the same reference numerals as in the first embodiment.

[0086] This embodiment achieves an improvement in aperture ratio with a similar configuration.

[0087] The photoelectric conversion element in this embodiment is a PIN type photoelectric conversion element.

[0088] In the PIN type photoe...

no. 3 approach

[0099] image 3 An example in which an X-ray detection device, which is an example of the radiation detection device according to the present invention, is applied to an X-ray diagnostic system is shown.

[0100] X-rays 6060 generated by an X-ray tube 6050 are transmitted through a patient's chest 6062 or an object 6061, and enter an X-ray detection device 6040 equipped with a scintillator at an upper part.

[0101] Information about the interior of the patient 6061 is included in the incoming X-rays.

[0102] The scintillator emits light in response to incidence of X-rays, and the emitted light is photoelectrically converted. Electric information can then be obtained.

[0103] This information is converted into a digital signal, and subjected to image processing by an image processor 6070 serving as signal processing means. Thus, images can be viewed using the display 6080 used as a display device in the control room.

[0104] In addition, the information can also be sent...

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Abstract

As to an electromagnetic radiation detecting apparatus, a radiation detecting apparatus, a radiation detecting system and a laser processing method, a TFT is disposed on an insulating substrate. A conversion element converting electromagnetic radiation into an electric signal is disposed over the TFT. A member for marking the position of the switching element is disposed on the conversion element. The position of a switching element having a defect can be located by means of the member on the conversion element. By radiating laser light to be focused on the member, it becomes possible to perform repair accurately.

Description

technical field [0001] The present invention relates to an electromagnetic radiation detection device, a radiation detection device, a radiation detection system, and a laser processing method, and more particularly, to an electromagnetic radiation detection device, a radiation detection device, a radiation A detection system and a laser processing method. Furthermore, it is assumed in the present invention that electromagnetic radiation includes light such as visible light, infrared light, ultraviolet light, and radiation such as X-rays, alpha rays, beta rays, gamma rays, and the like. Background technique [0002] Many liquid crystal display devices and optical sensors have been produced in recent years, all of which include an array of switching elements formed on a glass substrate composed of thin film transistors (TFTs) using non-single crystal semiconductors such as hydrogenated amorphous silicon ( a-Si:H). [0003] The driving principles common to MOS transistors fo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/14H01L23/544H01L21/00
Inventor 八木朋之远藤忠夫龟岛登志男竹中克郎横山启吾
Owner CANON KK
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