Quasi cobalt carbon diaphragm

Abstract

This invention provides a diamond-like carbon film, which is composed of n layers (n is 6-30). The component of each layer is diamond-like carbon containing C, H and X, where, X is Cr, Ti, Cr-Ti alloy or chromium nitride. The component of layer m is a-C: H :( n-m+1) X, where, m is 1-n. The atomic percentage of X is decreasing from the layer of 1 (nearest to the matrix) to n. The diamond-like carbon film can be used as a protection film for molds, cutters or magnetic storage media.

Description

【Technical field】 [0001] The invention relates to a film layer structure, in particular to a diamond-like carbon film applied to molds, cutters or magnetic storage media. 【Background technique】 [0002] Diamond-like carbon (Diamond-Like Carbon, DLC) was produced by Aisenberg et al. in the early 1970s by ion beam sputtering deposition technology. Since then, studies on the properties and applications of diamond-like carbon have been carried out one after another. [0003] As we all know, the chemical bonds of carbon allotropes (Allotropes) are: sp 1 Chain structure, sp 2 Graphite layered structure and sp 3 There are three forms of covalent bond diamond cubic structure, so carbon exists in various crystalline and amorphous solid forms. That is to say, there are many kinds of carbon materials composed of simple bonds or mixed bonds, and the mixture of different bonds will affect the electrical, optical, chemical and mechanical properties of the carbon materials. The so-cal...

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Problems solved by technology

However, the bond between the diamond-like carbon film and the substrate is not firm, and it is easy to fall off

The reasons are: first, the DLC film has stable performance and does not react chemically with any substrate, so the connection between it and the substrate is an intermolecular force and the adhesion is wea

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