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Quasi cobalt carbon diaphragm

A carbon film, a kind of technology, applied in the field of diamond-like carbon film, can solve the problems of high internal stress of diamond-like carbon film, weak bonding, and restrictions on the development and application of diamond-like carbon film

Inactive Publication Date: 2007-05-09
HONG FU JIN PRECISION IND (SHENZHEN) CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the bond between the diamond-like carbon film and the substrate is not firm, and it is easy to fall off
The reasons are: first, the DLC film has stable performance and does not react chemically with any substrate, so the connection between it and the substrate is an intermolecular force and the adhesion is weak; second, the DLC film and the substrate The difference in thermal expansion coefficient between materials is too large, resulting in the residual stress between the substrate and the DLC film and the high internal stress of the DLC film.
This limits the further development and application of diamond-like carbon films

Method used

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Embodiment Construction

[0015] In order to reduce the internal stress of the diamond-like carbon film and improve its adhesion to the substrate, the embodiment provides a diamond-like carbon film with a multi-layer structure, and the diamond-like carbon film is amorphous hydrogen-containing diamond-like carbon. Please refer to FIG. 1 , which is a schematic diagram of the structure of the diamond-like carbon film 10 . The number of layers contained in the diamond-like carbon film 10 is represented by n, and the value of n is an integer ranging from 6 to 30, and the composition of each layer is different from other layers. It is assumed that one end combined with the substrate is the first layer 11 , and the other end opposite to it is the nth layer 16 . Assuming that a certain layer is the mth layer, and m is an integer from 1 to n, the composition of the mth layer is a-C:H:(n-m+1)X. That is to say, the composition of the first layer 11 is: a-C:H:nX, the composition of the second layer 12 is: a-C:H:(...

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Abstract

This invention provides a diamond-like carbon film, which is composed of n layers (n is 6-30). The component of each layer is diamond-like carbon containing C, H and X, where, X is Cr, Ti, Cr-Ti alloy or chromium nitride. The component of layer m is a-C: H :( n-m+1) X, where, m is 1-n. The atomic percentage of X is decreasing from the layer of 1 (nearest to the matrix) to n. The diamond-like carbon film can be used as a protection film for molds, cutters or magnetic storage media.

Description

【Technical field】 [0001] The invention relates to a film layer structure, in particular to a diamond-like carbon film applied to molds, cutters or magnetic storage media. 【Background technique】 [0002] Diamond-like carbon (Diamond-Like Carbon, DLC) was produced by Aisenberg et al. in the early 1970s by ion beam sputtering deposition technology. Since then, studies on the properties and applications of diamond-like carbon have been carried out one after another. [0003] As we all know, the chemical bonds of carbon allotropes (Allotropes) are: sp 1 Chain structure, sp 2 Graphite layered structure and sp 3 There are three forms of covalent bond diamond cubic structure, so carbon exists in various crystalline and amorphous solid forms. That is to say, there are many kinds of carbon materials composed of simple bonds or mixed bonds, and the mixture of different bonds will affect the electrical, optical, chemical and mechanical properties of the carbon materials. The so-cal...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/35
Inventor 陈杰良
Owner HONG FU JIN PRECISION IND (SHENZHEN) CO LTD
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