Unlock instant, AI-driven research and patent intelligence for your innovation.

SU-8 epoxy resin separation method

An epoxy resin, SU-8 technology, applied in the field of materials, can solve the problems of difficulty in making nano-scale three-dimensional microstructures, affecting the resolution of the production graphics, the uniformity of the structure and the filling ratio, etc., to solve the problems of absorption and shrinkage problem, the effect of increasing the resolution

Inactive Publication Date: 2010-05-19
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
View PDF2 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the experiment, SU-8 glue was applied to the production of nano-scale three-dimensional photonic crystal structure, and it was found that it has non-negligible absorption and shrinkage problems, which directly affect the resolution of the produced graphics, the uniformity of the structure and the filling ratio, making it difficult to Fabrication of nanoscale 3D microstructures

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • SU-8 epoxy resin separation method
  • SU-8 epoxy resin separation method
  • SU-8 epoxy resin separation method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] Example 1 is to measure 300 mL each of silica gel and dichloromethane solvent, add silica gel into the dichloromethane solvent, stir, and mix well. Pour the mixture of silica gel and dichloromethane into the chromatography column. The inner diameter of the chromatography column is Φ19, the outer diameter is Φ24. The volume of the mixture of silica gel and dichloromethane accounts for 2 / 3 of the volume of the chromatography column. Open the plunger, add 6g of sea sand after the silica gel precipitates, the sea sand layer acts as a buffer layer, and the sea sand layer occupies 1 / 30 of the volume of the chromatographic column. Weigh 8g of SU-8 epoxy resin, dissolve it in cyclopentanone solvent, prepare a saturated solution, add it on the sea sand layer, and the volume of the saturated solution accounts for 1 / 20 of the volume of the chromatographic column. Add 200 mL of dichloromethane solvent into the chromatography column, and the volume of dichloromethane accounts for 1 / ...

Embodiment 2

[0029] Example 2 is to measure 150 mL each of silica gel and dichloromethane solvent, add the silica gel into the dichloromethane solvent, stir, and mix well. Pour the mixture of silica gel and dichloromethane into the chromatographic column. The inner diameter of the chromatographic column is Φ15, the outer diameter is Φ19. Open the piston, add 3g of sea sand after the silica gel precipitates, the sea sand layer is used as a buffer layer, and the volume of the sea sand layer is 1 / 30 of the volume of the chromatographic column. Weigh 4g of SU-8 epoxy resin, dissolve it in a cyclopentanone solvent, prepare a saturated solution, add it to the sea sand layer, and the volume of the saturated solution accounts for 1 / 20 of the volume of the chromatographic column. Add 100 mL of dichloromethane solvent into the chromatography column, and the volume of dichloromethane accounts for 1 / 4 of the volume of the chromatography column. Dichloromethane was used as the mobile phase of the chro...

Embodiment 3

[0033] Embodiment 3 is to open the high pressure liquid chromatograph, preheat 30mins. Different components separated by the chromatographic column were weighed and dissolved in dichloromethane solvent to prepare a solution with a concentration of 0.2% (percentage by weight). Turn on the computer, set the experimental parameters, the flow rate is 0.5mL / min, the test time is 10mins, and the sensitivity is 0.01s. Use the exhaust needle of the high-pressure liquid chromatograph to perform exhaust treatment. Inject about 100 mL of the sample (the sample prepared in step 2) with the injection needle of the high-pressure liquid chromatograph. The application software is used for testing, and when different components flow through the chromatographic column of the high-pressure liquid chromatograph, the graph of their relative concentration versus the calculated molecular weight is obtained.

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a separating method of SU-8 epoxy resin through column chromatography and high-pressure liquid-phase chromatogram-size resistance-remove chromatography, which produces SU-8 epoxy resin with large molecular weight from 100 to 100000 with multiple components and composition of SU-8, SU-6, SU-4, SU-2 and SU-1 not single SU-8 on the paper, wherein the SU-1, SU-2, SU-4 and theircomposition possesses strong adsorption on the near-ultraviolet band, which can't crosslink completely after exposing to form low-distinguishability and gel-condensing problem.

Description

technical field [0001] The invention relates to a separation method of SU-8 epoxy resin, which belongs to the technology in the field of materials. Background technique [0002] The commercialized SU-8 photoresist is a negative, near-ultraviolet photoresist, which mainly consists of three parts: SU-8 epoxy resin, photosensitizer and organic solvent. Wherein SU-8 epoxy resin has always been considered that its molecular structure only contains 8 epoxy groups, so named SU-8 (Dr Louis J.Guerin, www.SU8 homepage.htm; Zhang Liguo, Chen Di, Yang Fan, etc., Optical Precision Engineering, Vol.10, No.3, Jun.2002; Liu Jingquan, Zhu Jun, Cai Bingchu, etc., Microfabrication Technology, No.2Jun.2002; Liu Jingquan, Cai Bingchu, Chen Di et al., Micro-Nano Electronic Technology, July~August, 2003). Because SU-8 glue has good mechanical properties, chemical corrosion resistance and thermal stability; it is non-conductive and can be used directly as an insulator during electroplating; makin...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): C08G59/00G01N30/02G03F7/00
Inventor 张晓玉姚汉民邢廷文
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI