Compact system module with built-in thermoelectric cooling

Abstract

An improved integrated circuit package for providing built-in heating or cooling to a semiconductor chip is provided. The improved integrated circuit package provides increased operational bandwidth between different circuit devices, e.g. logic and memory chips. The improved integrated circuit package does not require changes in current CMOS processing techniques. The structure includes the use of a silicon interposer. The silicon interposer can consist of recycled rejected wafers from the front-end semiconductor processing. Micro-machined vias are formed through the silicon interposer. The micro-machined vias include electrical contacts which couple various integrated circuit devices located on the opposing surfaces of the silicon interposer. The packaging includes a Peltier element.

Description

[0001] This application is a divisional of U.S. application Ser. No. 10 / 606,539 filed Jun. 26, 2003, which is a divisional of U.S. application Ser. No. 09 / 144,307 filed on Aug. 31, 1998, now U.S. Pat. No. 6,586,835, which are incorporated herein by reference.[0002] 1. Field of the Invention [0003] The present invention relates generally to semiconductor integrated circuits. More particularly, it pertains to a compact system module with built-in thermoelectric cooling. [0004] 2. Background of the Invention [0005] Integrated circuit technology relies on transistors to formulate vast arrays of functional circuits. The complexity of these circuits requires the use of an ever increasing number of linked transistors. As the number of transistors required increases, the integrated circuitry dimensions shrink. It is one objective in the semiconductor industry to construct transistors and other discrete devices which occupy less surface area on a given silicon chip / die. At the same time, the...

AI Technical Summary

Benefits of technology

The present invention provides an improved integrated circuit package that addresses performance issues and provides built-in heating or cooling to a semiconductor chip. The package includes a silicon interposer with micro-machined vias and a Peltier element that functions as a small heat pump. The Peltier element can cool or heat one portion of the package while the other portion is in contact with a heat sink or the outer cover of the package. The design is small in size and lightweight, and can cool below or heat above the ambient temperature surrounding integrated circuit devices. The technical effects of the invention include increased operational bandwidth between different circuit devices, improved cooling for high frequency, high speed microprocessor chip components, and reduced size and weight of the integrated circuit package.

Problems solved by technology

The complexity of these circuits requires the use of an ever increasing number of linked transistors.

Unfortunately, it is very difficult with today's technology to implement a truly high-performance “system on a chip” because of vastly different fabrication processes and different manufacturing yields for the logic and memory circuits.

Several problems, however, remain inherent with this design structure.

One serious complication includes the heating which occurs most seriously in connection with a logic chip such as a microprocessor.

In high-performance microprocessors, where CPUs are running at 500 MHz and dissipating up to 85 watts of power, cooling becomes a crucial issue.

In certain applications, however, forced air cooling is not feasible or practical.

Still, liquid cooling methods can also prove too bulky, costly, and not easily adapted for use in compact high-performance integrated circuit systems, e.g. portable devices.

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