Diamond-Covered Substrate, Filter And Electrode
a technology of diamond layer and substrate, applied in the direction of electrode coating, separation process, instruments, etc., can solve the problems of deterioration of diamond layer, serious efficiency loss, and easy corrosion of conventional ceramic filters, and achieve low resistance of diamond layer, improve power efficiency, and improve the effect of resistance valu
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example 1
[0037] A film of electroconductive diamond layer was formed by use of the substrates listed in Table 1. The substrate used here had an open pore diameter of about 1 μm. As a pretreatment, it was subjected to a scratching treatment with diamond powder, or an ultrasound treatment in a solution containing diamond powder dispersed therein. The size of the diamond powder varied from 0.2 μm to 3.0 μm.
[0038] Synthesis by hot filament CVD was carried out under a gas pressure of 60 Torr, hydrogen flow of 3,000 sccm, and a methane flow of 0.5 to 5.0 sccm. The boron source was diborane gas. The diborane flow was supplied at a concentration of 0.2 to 1.0% with respect to methane. The temperature of the substrate was 700 to 1,000° C. In the case of microwave CVD, the microwave frequency was 2.4 GHz, and the microwave output was 5 kW. In all cases the boron was contained in the range of from 10 ppm to 10,000 ppm.
[0039] As displayed in Table 1, nucleation density was changed by modifying the met...
example 2
[0041] An electroconductive diamond film was formed on the porous substrates in which the open pore diameter varied as illustrated in Table 2. Using the produced diamond-covered substrates, a solution was circulated through the substrate by a pump that fed the solution from one side of the substrate towards the opposite side. As the solution, a mixture of a sludge-like precipitate including diamond powder and a mixed organic solution of trichloroethylene and acetone, was mixed into a 0.1 M aqueous solution of sulfuric acid, then it was used. An electrochemical oxidation treatment was carried out simultaneously while this solution was filtered. Filtration of the solution proceeded for 4 hours through recirculation of the solution.
TABLE 2SubstrateOpen poreNo.materialdiameter (μm)Test result2-1Nb0.09No solutionpassage2-2Nb0.11Filtrationpossible2-3Nb999Filtrationpossible2-4Nb1001Substratebreakage
[0042] No. 2-1, which had a largest open pore diameter smaller than 0.1 μm, the porous sub...
example 3
[0043] An electroconductive diamond film was formed on a porous substrate by use of the substrate materials varied as shown in Table 3. An electrochemical oxidation treatment was carried out in the same way as in Example 1. × denotes substrates that suffered corrosion during the treatment, while ◯ denotes substrates where no corrosion occurred. The electrochemical oxidation treatment was prolonged a further 100 hours with a current density of 1.5 A / cm2 (electrolysis treatment 2). × denotes the substrates suffering delamination between the substrate and the diamond film, while ◯ denotes the substrates where no such delamination occurred.
TABLE 3Electrolysistreatment 2SubstrateSubstrateFilmNo.materialcorrosiondelamination3-1Al∘x3-2Ta∘x3-3Nb∘∘3-4Hf∘x3-5Zr∘x3-6Zn∘x3-7Mox—3-8Cux—
[0044] As for the substrate materials in Nos. 3-1 to 3-6, the electrochemical oxidation treatment could proceed stably. Other than them, Nos. 3-7 and 3-8 suffered corrosion at portions where the substrate was no...
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