Fe-Co based target material and method for producing the same

Inactive Publication Date: 2008-02-14
SANYO SPECIAL STEEL COMPANY
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  • Abstract
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  • Claims
  • Application Information

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Benefits of technology

[0009] It is therefore an object of the present invention to provide an Fe—Co based target material and a method for producing the Fe—Co based target material capable of ensuring

Problems solved by technology

In the magnetic record media for the longitudinal magnetic recording systems currently used worldwide, however, an attempt to realize a high record density leads to refined record bits, which require a high coercivity to such an extent that recording cannot be made with the record bits.
Since the magnetron sputtering method has a feature of leaking the magnetic flux on the sputtering surface of the target material, in the case where magnetic permeability of the target material itself is high, it is diffi

Method used

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examples

[0025] Examples of the present invention will be in detail explained hereinafter.

[0026] As shown in Table 1, Fe—Co based alloys were produced by gas-atomizing methods or casting method. The gas-atomizing methods were carried out on condition that the type of gas was an argon gas, the nozzle diameter was 6 mm and the gas pressure was 5 MPa. On the other hand, the casting methods were carried out by melting the alloys in a ceramic vessel (diameter: 200 mm; length: 30 mm) and then pulverizing the alloys to powders. Powders thus produced were classified into 500 μm or less and each powder was stirred for one hour by a V-type mixer.

[0027] Each powder thus produced was filled in an enclosing vessel made of a SC steel having a diameter of 200 mm and a height of 100 mm and was encapsulated with vacuum evacuation at an ultimate vacuum of 10−1 Pa or less, followed by an HIP (hot isostatic pressing) at a temperature of 1173K under a pressure of 150 MPa for a holding time of 5 hours. Next, th...

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Abstract

There is disclosed a method for producing a Fe—Co based target material for forming a soft magnetic thin-film. This method comprises the steps of: preparing a first raw-material powder having an Fe:Co weight ratio ranging from 8:2 to 7:3 and a second raw-material powder having an Fe—Co weight ratio ranging from 2:8 to 0:10; mixing the first raw-material powder and the second raw-material powder together to obtain a powder mixture having an Fe:Co weight ratio ranging from 8:2 to 2:8; and applying a pressure of not less than 100 MPa to the powder mixture at a temperature ranging from 1073 to 1473 K for consolidation. At least one additional element selected from the group consisting of Nb, Zr, Ta and Hf is added to either one or both of the first and second raw-material powders in a total amount of 3 to 15 atom % with respect to the total amount of the powder mixture. The Fe—Co based target material thus produced has a high density, while having a magnetic permeability lower than the conventional one.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS [0001] This application claims priority to Japanese Patent Application No. 128224 / 2006 filed on May 2, 2006, the entire disclosure of which is incorporated herein by reference. TECHNICAL FIELD [0002] This invention relates to a Fe—Co based target material for forming a soft magnetic thin-film by a sputtering method, and a method for producing the target material. BACKGROUND ART [0003] The recent progress in the magnetic recording technology is remarkable, and the record densities of magnetic record media are being heightened for increasing capacities of drives. In the magnetic record media for the longitudinal magnetic recording systems currently used worldwide, however, an attempt to realize a high record density leads to refined record bits, which require a high coercivity to such an extent that recording cannot be made with the record bits. In view of this, a perpendicular magnetic recording system is under study as a means of solving these...

Claims

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Application Information

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IPC IPC(8): C22C38/10B22F1/00C22C38/12C22C38/14C22C19/07
CPCB22F3/15B22F3/12C22C1/0433C22C19/07C22C33/0257C22C38/10C22C38/12C22C38/14C22C2202/02C23C14/3414H01F1/22H01F10/14H01F10/16H01F41/0246B22F2998/10B22F1/0003B22F1/09
Inventor YANAGITANI, AKIHIKOAIKAWA, YOSHIKAZU
Owner SANYO SPECIAL STEEL COMPANY
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