Unlock instant, AI-driven research and patent intelligence for your innovation.

Imaging apparatus and radiation imaging system

a radiation imaging and imaging apparatus technology, applied in the direction of x/gamma/cosmic radiation measurement, radioation controlled devices, instruments, etc., can solve the problem of increasing parasitic capacitance, and achieve the effect of reducing the capacitance between wirings and high s/n ratio

Inactive Publication Date: 2009-12-10
CANON KK
View PDF19 Cites 12 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This configuration effectively reduces capacitance between wirings, enhancing the S / N ratio and enabling high-quality image capture with reduced noise and artifacts, particularly suitable for applications like video shooting and radiation imaging.

Problems solved by technology

However, in known apparatuses, when a plurality of TFTs is arranged, the number of wirings that cross a signal wiring via a gate insulation layer is increased, thus increasing a parasitic capacitance.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Imaging apparatus and radiation imaging system
  • Imaging apparatus and radiation imaging system
  • Imaging apparatus and radiation imaging system

Examples

Experimental program
Comparison scheme
Effect test

first embodiment

[0037]FIGS. 1 to 12 show a first embodiment of the present invention. FIGS. 1, 7, and 8 are plan views of a pixel. FIGS. 2, 3, 9, and 10 are cross-sectional views of a pixel. FIG. 11 illustrates a pixel area and peripheral circuits. FIG. 12 illustrates a simple equivalent circuit diagram and peripheral circuits.

[0038]A first characteristic of the present embodiment is a laminated structure having a plurality of insulating layers disposed between a switching element and a conversion element and at least one of gate wiring and signal wiring being arranged in a region sandwiched between insulating layers. A second characteristic is that the switching element has a source-follower structure that has a plurality of thin-film transistors (TFTs) including a reading TFT electrically connected to the signal wiring and a selecting TFT electrically connected to power-supply wiring and the reading TFT. The first and second characteristics are common to all embodiments. The switching element can...

second embodiment

[0075]FIGS. 13 to 20 show a second embodiment of the present invention. FIGS. 13, 16, and 18 are plan views of a pixel in an imaging apparatus according to the second embodiment. FIGS. 14, 15, and 17 are cross-sectional views of a pixel in the imaging apparatus. FIGS. 19 and 20 illustrate a simple equivalent circuit diagram and peripheral circuits.

[0076]The main characteristics of the present embodiment are that at least one of a gate wiring and a signal wiring is arranged in a region sandwiched between a plurality of insulating layers disposed between a TFT and a conversion element even in a top-gate polycrystalline silicon TFT.

[0077]FIG. 13 is a plan view of a pixel in an imaging apparatus according to a second embodiment of the present invention.

[0078]As illustrated in FIG. 13, a single pixel includes three TFTs consisting of a reading TFT 2, a selecting TFT 3 electrically connected to power-supply wiring 13 and the reading TFT 2, and a resetting TFT 4 electrically connected to r...

third embodiment

[0094]FIG. 21 illustrates an example of an application of a radiation imaging apparatus according to at least one of the embodiments of the present invention to a radiation imaging system.

[0095]An X-ray beam 6060 generated by an X-ray tube 6050 being a radiation source passes through a chest 6062 of a patient or subject 6061 and enters a radiation imaging apparatus 6040 including a scintillator disposed in the upper portion. The radiation imaging apparatus 6040 can include an image sensor. The incident X-ray beam contains information on the interior of the body of the subject 6061. In response to incidence of the X-ray beam, the scintillator emits light, and the radiation imaging apparatus 6040 photoelectrically converts the light and obtains electrical information. The information is converted into digital, and it is subjected to image processing performed by an image processor 6070 being a signal processing unit, and it observable on a display 6080 being a display unit in a contro...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

An imaging apparatus includes a plurality of pixels disposed on an insulation substrate. Each of the pixels includes a plurality of thin-film transistors, a conversion element disposed above the TFTs, and a plurality of insulating layers disposed between the conversion element and the plurality of TFTs. The plurality of TFTs includes a reading TFT having a gate electrode electrically connected to the conversion element and a first selecting TFT electrically connected to a source electrode or a drain electrode of the reading TFT. At least one of a signal wiring, to which a signal corresponding to an electric charge obtained by conversion of incident light or radiation performed by the conversion element is transferred, and a gate wiring that supplies a driving signal to a gate electrode of the first selecting thin-film transistor, is disposed between the plurality of insulating layers.

Description

BACKGROUND OF THE INVENTION[0001]1. Field of the Invention[0002]The present invention relates to an imaging apparatus that includes a thin-film transistor (TFT) and a conversion element, a method for manufacturing the imaging apparatus, and a radiation imaging system.[0003]2. Description of the Related Art[0004]A technique for manufacturing a liquid crystal panel that employs a TFT is utilized in an area sensor that includes a conversion element that converts light (e.g., visible light) or radiation (e.g., an X ray) into an electric signal.[0005]U.S. Patent No. 2003-0010922 describes an apparatus that includes a first protecting insulation layer on a TFT array, storage capacity electrodes connected to a ground wire on the first protecting insulation layer, a second protecting insulation layer that covers the storage capacity electrodes formed on the first protecting insulation layer, and a pixel electrode connected to a drain electrode of the TFT on the second protecting insulation ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(United States)
IPC IPC(8): G01T1/24H01L31/0376
CPCG01T1/2928H01L27/14692H01L27/14658
Inventor WATANABE, MINORUMOCHIZUKI, CHIORIISHII, TAKAMASA
Owner CANON KK