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Making process of C/C heater for monocrystal silicon drawing furnace and polycrystal silicon smelting furnace

A heater and polysilicon technology, which is applied in the field of heating furnace heaters, can solve the problems of difficulty in meeting the production and development requirements of semiconductor polysilicon and single crystal silicon, difficulty in forming large-scale products, poor high-temperature thermal shock resistance, etc., and achieve a compact effect. Good, implementable, enhanced strength effect

Active Publication Date: 2008-02-06
XIAN CHAOMA SCI TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] At present, the heaters for monocrystalline silicon drawing furnaces and polycrystalline silicon smelting furnaces are basically made of graphite. Due to the low strength of graphite products, poor high temperature thermal shock resistance, short service life, frequent replacement, and low purity, it is difficult to form large-scale products. , making it difficult to meet the requirements of semiconductor polysilicon and monocrystalline silicon production development

Method used

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  • Making process of C/C heater for monocrystal silicon drawing furnace and polycrystal silicon smelting furnace

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] (1) 12K needle-punched carbon cloth and non-weft cloth are used to make a full carbon fiber three-way structure heater prefabricated body, and the volume density of the heater prefabricated body is 0.3g / cm 3 , using acupuncture technology to introduce reinforcing fibers in the vertical direction of the heater preform, where K represents the number of thousands of tows;

[0026] (2) Asphalt impregnation and carbonization densification process: under the pressure of 1.5MPa, put the heater preform in step (1) into the impregnation tank for 5 hours, the asphalt preheating temperature is 190°C, and the heater preform is impregnated Afterwards, transfer to a carbonization furnace for carbonization treatment, and the carbonization temperature is 1000°C;

[0027] (3) Process the heater product in step (2) in the treatment furnace, and the treatment temperature is 1800°C;

[0028] (4) Furfurone resin impregnation and carbonization densification process: at a preheating temperat...

Embodiment 2

[0033](1) 12K needle-punched carbon cloth and non-weft cloth are used to make a full carbon fiber three-way structure heater prefabricated body, and the volume density of the heater prefabricated body is 0.5g / cm 3 , using acupuncture technology to introduce reinforcing fibers in the vertical direction of the heater preform, where K represents the number of thousands of tows;

[0034] (2) Asphalt impregnation and carbonization densification process: under the pressure of 1.0 MPa, put the heater preform in step (1) into the impregnation tank for 5 hours, and the asphalt preheating temperature is 190°C, and the heater preform is impregnated Afterwards, transfer to a carbonization furnace for carbonization treatment, and the carbonization temperature is 800°C;

[0035] (3) Process the heater product in step (2) in the treatment furnace, and the treatment temperature is 2000°C;

[0036] (4) Furfurone resin impregnation and carbonization densification process: at a preheating tempe...

Embodiment 3

[0041] (1) 12K needle-punched carbon cloth and non-weft cloth are used to make a full carbon fiber three-way structure heater prefabricated body, and the volume density of the heater prefabricated body is 0.6g / cm 3 , using acupuncture technology to introduce reinforcing fibers in the vertical direction of the heater preform, where K represents the number of thousands of tows;

[0042] (2) Asphalt impregnation and carbonization densification process: under the pressure of 1.4MPa, put the heater preform in step (1) into the impregnation tank for 5 hours, the asphalt preheating temperature is 190°C, and the heater preform is impregnated Afterwards, transfer to a carbonization furnace for carbonization treatment, and the carbonization temperature is 1100°C;

[0043] (3) Process the heater product in step (2) in the treatment furnace, and the treatment temperature is 1500°C;

[0044] (4) Furfurone resin impregnation and carbonization densification process: at a preheating temperat...

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Abstract

The present invention relates to preparation process of C / C heater for monocrystal silicon drawing furnace and polycrystal silicon smelting furnace. The preparation process includes preparing 3D heat isolating screen prefab with carbon fiber; dipping the prefab in pitch or furfural acetone resin and charring repeatedly and treating the compacted heater prefab at high temperature to raise the surface opening rate for several times to reach the density of 1.60 g / cu cm; high temperature purifying the heat isolating screen through introducing chlorine and Freon; and final machining to obtain the C / C heater for monocrystal silicon drawing furnace and polycrystal silicon smelting furnace. The C / C heater for monocrystal silicon drawing furnace and polycrystal silicon smelting furnace has effectively lowered resistivity, low cost and long service life.

Description

technical field [0001] The invention belongs to the technical field of heating furnace heaters for monocrystalline silicon drawing furnaces and polycrystalline silicon smelting furnaces, and in particular relates to a preparation method of a carbon / carbon heater for monocrystalline silicon drawing furnaces and polycrystalline silicon smelting furnaces. Background technique [0002] In addition to the furnace body being made of stainless steel, the single crystal furnace uses graphite parts for the heating system and supports including the crucible. The production of monocrystalline silicon is to melt the polycrystalline silicon material with a graphite heater in an inert gas environment, and grow a dislocation-free single crystal by the Czochralski method. Single crystal silicon is made of high-purity silicon powder, under protective atmosphere conditions such as hydrogen or argon, through 1400-1600 ℃ high-temperature melting seedlings to pull the crystal grains to grow grad...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B35/66C04B35/83
Inventor 肖志超彭志刚苏君明邓红兵吴大云孟凡才李睿邵海成邢如鹏赵大明
Owner XIAN CHAOMA SCI TECH
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