Method for making magnetosensitive device based on soft magnetic multilayer huge magnetoimpedance effect
A technology of giant magneto-impedance and manufacturing method, applied in the field of sensors, can solve the problems of wire and thin strip welding, easily broken wire and thin strip, difficult installation, etc., and achieve the effects of linearization, improved magnetic field sensitivity and low cost
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[0030] It will be further described below in conjunction with the embodiments.
[0031] The manufacturing method of the present invention, specifically:
[0032] (1) The photoresist was thrown on both sides of the cleaned and treated double-sided oxidized silicon substrate, the thickness of the photoresist was 5μm, the drying temperature of the photoresist was 95℃, and the time was 1 hour; single-sided (called B side) After exposure and development, use BHF etching solution to etch silicon dioxide at an etching temperature of 40°C, and then remove the photoresist;
[0033] (2) The magnetic sensor development process is carried out on the other side of the silicon wafer (referred to as A side), and the following are all carried out on the A side;
[0034] (3) Sputtering soft magnetic film F, F is FeCuNbSiB, FeCuNbCrSiB film, the thickness of the film is 2-6μm;
[0035] (4) Sputtering Cu bottom layer, the thickness is 100~200nm;
[0036] (5) Positive photoresist, the thickness of th...
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