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Metal plate belt vacuum film coating equipment

A metal strip and vacuum coating technology, which is applied in vacuum evaporation coating, metal material coating process, sputtering coating, etc., can solve problems such as unsatisfactory metal vapor ionization probability, complex composition structure, and product quality defects , to achieve the effect of low cost, smooth surface and dense microstructure

Active Publication Date: 2009-05-13
SICHUAN GOLDSTONE-ORIENT NEW MATERIAL TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

There are two main disadvantages in adopting this method: one is that the vacuum cathode arc coating equipment does not have an electron gun, and a small amount of "droplets" will fly out when "ablating metal materials", causing defects in product quality
However, these methods must have a set of equipment for generating plasma. In addition to the complex structure and increased cost, the ionization probability of metal vapor is not very ideal, up to 50%.

Method used

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  • Metal plate belt vacuum film coating equipment
  • Metal plate belt vacuum film coating equipment
  • Metal plate belt vacuum film coating equipment

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] Figure 1~ image 3 , give the illustrated embodiment 1 figure. See Figure 1~ image 3 Schematic diagram of the continuous production structure of the present invention, the metal strip unwinding mechanism 1 is arranged in the device of the present invention, and the horizontal welding machine 2 with welding gun is set behind the unwinder 1 (for the metal strip 4 welding between coils and coils connection), tape storage mechanism 3, vacuum box 5, high-frequency induction heater 6 and Hall bar-shaped ion source 8 in the vacuum box, vacuum coating chamber 9, two electron guns 7 for heating and evaporating metal materials, respectively set The separation pressure valve (or vacuum lock) 10, the cutting machine 11 provided with a cutting knife, and the metal strip winding mechanism 12 for establishing a pressure difference on the vacuum box and the vacuum coating chamber have a pair of sealed pressure rollers, such as image 3 As shown, in the vacuum coating chamber 9, an annu...

Embodiment 2

[0029] 4 to 8 are diagrams of Embodiment 2 of the present invention. The working principle of the present embodiment 2 is basically the same as that of the embodiment 1. In the present embodiment 2, the single box type production device has a vacuum coating casing 20 with a sandwich structure 19 for cooling water, a vacuum exhaust unit 21, and a metal strip 4. An unwinding mechanism 1, a metal strip winding mechanism 12, two electron guns 7 for heating and evaporating metal materials, a plasma positive electrode 13 is arranged around the metal vapor 16 between the metal strip 4 and the metal material 15, and the generated The dense plasma 17 ionizes the metal vapor 16 into metal particles 18. The metal strip 4 is provided with a Hall bar-shaped ion source 8 before modification. Going in and out of the vacuum box on the guide rail 28 of the frame 27, it is convenient to replace the metal plate coil and clean the surface of the polytetrafluoroethylene coating 24 on the inner wal...

Embodiment 3

[0035] Figure 1, Figure 2, Figure 9 Figure 3 of Embodiment 3 of the present invention is given. Embodiment 3 is basically the same as Embodiment 1, except that the direct-type electron gun 30 is used instead of the B-type electron gun 7 for evaporating metal materials.

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Abstract

The invention discloses a metal plate belt vacuum coating device, which comprises the following parts: metal plate belt putting reel machine, at least one electron gun of heat evaporating metallic material, plasma machine to ionize metallic vapour to metallic ion between metallic plate belt and evaporating metallic material, vacuum coating room, metallic plate belt wind-up machine, heating device to proceed pre-heat between the putting reel machine and vacuum coating room, at least one group of ion beam preprocessor to proceed activating treatment for the surface of the metallic plate belt, wherein linear electron gun is used to evaporate metallic material; the metallic steam is ionized to metallic ion when pass plasma area of high density; the metallic ion is quick deposited on the metallic plate belt under the function of electric field force. This product possesses high output and low cost, which surface microstructure of coating film is very dense and smooth.

Description

Technical field: [0001] The invention relates to a new type of vacuum coating equipment for metal strips, in particular to a kind of preheating of metal strips with high-frequency heaters or heaters coated with far-infrared emitting coatings, and using a spot-free heat arc The mechanism excites and ionizes metal vapor into metal ions, and then rapidly deposits them on the surface of the modified metal strip under the action of an electric field. The production equipment can be single-box discontinuous operation, or multi-box continuous operation. Background technique: [0002] Vacuum evaporation roll-to-roll coating production equipment is a very mature vacuum coating equipment. It was used to evaporate aluminum in a crucible and quickly coat a layer of aluminum film on plastic film or paper for electric fuses and packaging. and other industries. Later, it was developed to quickly evaporate metal materials with an electron gun, so that metal vapor is deposited on the metal...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24
Inventor 甘国工
Owner SICHUAN GOLDSTONE-ORIENT NEW MATERIAL TECH CO LTD