Method for copying surface basso-relievo microstructure based on Darman raster

Abstract

The invention discloses a duplicating method of Damon grid of face embossing micro-structure, which comprises the following steps: utilizing polydimethyl siloxane to make the Damon grid mould of face embossing micro-structure; adopting ultraviolet gel as duplicating material; using stamping technique to duplicate the Damon grid of face embossing micro-structure on the ultraviolet gel on the glass base. The invention has simple technique, low cost and short making period, which can do large batch of production.

Description

technical field [0001] This patent relates to a Damman grating, in particular to a method for replicating a surface-relief microstructure Damman grating. Background technique [0002] Damman grating is a very important optical component, which is widely used in the fields of optical measurement, integrated optics, optical communication and optical information processing. Surface-relief microstructure Damman gratings are mainly manufactured by microelectronic technology, which is expensive and not suitable for mass production. Combining microstructured grating manufacturing technology with microstructure replication technology is an effective method for mass production of microstructured Damman gratings at low cost. [0003] At present, the replication technologies of surface-relief microstructured optical devices mainly include hot embossing, injection moulding, casting and UV-embossing and sol-gel (sol-gel) methods. . [0004] The above several methods usually need to fo...

AI Technical Summary

Problems solved by technology

[0011] First of all, most of the existing replication methods need to make a metal mold, which needs to coat a layer of metal film on the glass grating, and then electroplate a nickel mold. The process of making the mold is complicated, the cost is high, and the manufacturing cycle is also very long.

[0012] Secondly, hot pressing and injection molding replication methods require special replication equipment, and high temperature and high pressure are required for replication, and it is difficult to accurately replicate deep microstructures with small feature sizes and high aspect ratios.

[0013] Third, the refractive index of thermoplastics and glass is quite different from the material used for replication, and the optical properties of the copied grating are not exactly the same as those of the original grating.

Casting and UV replication Although the replication material uses UV glue that is very close to glass, but still uses metal as the mold, the process is complicated and the cost is high

The process of the sol-gel method is more complicated, and the high shrinkage of the sol-gel material has not been well solved

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