Semiconductor luminescent device and mfg method thereof
Patent Information
- Authority / Receiving Office
- CN Β· China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SUN YAT SEN UNIV
- Publication Date
- 2008-04-09
- Estimated Expiration
- Not applicable Β· inactive patent
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Abstract
Description
technical field
[0001] The invention relates to a semiconductor light emitting device and a manufacturing method thereof. Background technique
[0002] III-V nitride semiconductor materials are widely used in violet, blue, green and white light-emitting diodes, violet lasers for high-density optical storage, ultraviolet light detectors, and high-power high-frequency electronic devices. However, due to the lack of suitable substrates, current high-quality GaN-based material films are usually grown on sapphire or SiC substrates, but both substrates are relatively expensive, especially SiC, and are relatively small in size. In addition, sapphire has the disadvantages of extremely high hardness, non-conductivity, and poor thermal conductivity.
[0003] In order to overcome the above shortcomings, people have been continuously exploring the growth of GaN using Si as a substrate. It is expected that the heteroepitaxial growth of III-nitride light-emitting devices on Si substrates...