Electric control optical switch array micro-fluidic chip manufacture method

Abstract

The invention discloses a method for producing micro flow control optical switch array processes and relates to a novel integral producing method for an optical switch array frame which is operated through electric control signals. The novel integral producing method is based on a micro flow control technique. The method adopts mechanical processing, PDMS micro flow control chip production, coating, and sealing to realize integral production of a sandwich frame which includes 'a light wave guiding layer (7), a base plate conducting layer (11), an insulating layer (5) with a conducting film block, and an upper cover plate (4)' and realize the frame of micro flow control optical switch array chip. Main steps of the integral producing method comprise: production of the light wave guiding layer, production of a driving switch frame, production of the base plate conducting layer, and chip sealing, wherein basal material of a cover plate, the light wave guiding layer, and the base plate is polydimethyl siloxane (PDMS), and the conducting film block on the insulating layer are produced through adopting PVA thin films.

Description

technical field [0001] The invention relates to a novel integrated manufacturing method of an electrically tuned microfluidic control optical switch array chip, and belongs to the technical field of optical communication network device integration. Background technique [0002] Microfluidic optics is a new technology of great significance. It combines modern microfluidic technology and micro-optoelectronics technology to develop a class of optical integrated devices and The system will have important application prospects in the fields of sensing, communication, and information processing. [0003] As the key and core of micro-total analysis system, microfluidic technology has always been a research focus in the field of MEMS. With the continuous improvement of the level of microfluidic technology and the continuous penetration and integration with other disciplines, a number of eye-catching research hotspots have emerged in recent years, among which microfluidic optical de...

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Problems solved by technology

[0004] Although the existing optical switches have their own unique advantages, it also allows us to see the shortcomings of the existing optical switches, especially the parameter of the switching matrix.

Except for a few types of optical switches such as MEMS, the switching capacity of existing optical switches is always limited, and it is difficult to make a large array; and MEMS optical switches themselves are also insufficient in terms of high port density and resistance to mechanical friction, wear or vibration. place

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