Thin film transistor array base plate and its making method

Abstract

The invention discloses a thin film transistor array substrate and a method for manufacturing the same. The thin film transistor array substrate is provided with a scanning wiring conductive layer, an insulation layer, a data conductive layer, a passivation insulation layer and a transparent conducive layer in sequence. The scanning wiring conductive layer is provided with a scanning wiring and a common electrode line; the insulation layer comprises a gate insulating film; the scanning wiring is at least partially exposed and is in direct electric contact with the data conductive layer above; the array substrate of the structure can reduce signal delay of the scanning wiring and can also realize self-repair when the scanning wire breaks without a special repairing line being arranged.

Description

technical field [0001] The invention relates to an array substrate and a manufacturing method thereof, in particular to a self-repairable thin film transistor array substrate capable of reducing wiring signal delay and a manufacturing method thereof. Background technique [0002] A liquid crystal display (LCD) is a flat panel display widely used at present, and has the characteristics of low power consumption, thin appearance, light weight, and low driving voltage. Thin-film transistor liquid crystal display (TFT-LCD) is the most important type of liquid crystal display, which has the advantages of small size, light weight, and no radiation. A thin film transistor liquid crystal display generally includes a liquid crystal display panel and a backlight module. Wherein, the liquid crystal display panel includes a thin film transistor array substrate, a color filter substrate and a liquid crystal layer arranged between the two substrates. The display area of ​​the liquid crys...

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Problems solved by technology

[0003] However, as the display area of ​​the display device increases, the scanning wiring connected to the TFT becomes longer and longer, causing an increase in wiring resistance, resulting in an increase in signal delay, which poses a problem for in-plane uniform display

In order to reduce the signal delay caused by the increase in resistance, Chinese published patents 200610132270.3 and 200610099012 propose the use of copper wiring with lower resistance, but the copper process is less compatible with the existing process and may cause other problems

The traditional method is to increase the width of the wiring, which reduces the aperture ratio and leads to an increase in cost; in addition, the film thickness of the wiring is increased, and the increase in the film thickness of the wiring brings about an increase in cost and a change in the step coverage. Poor, resulting in a decline in product yield

[0004] In addition, during the manufacturing process of the thin film transistor array substrate, scanning disconnection defects may occur

When the scanning wiring defect occurs on the thin film transistor array substrate, if the disconnection is not repaired, the manufacturing yield of the thin film transistor array substrate will be greatly reduced, resulting in a significant increase in manufacturing costs. Therefore, it is necessary to disconnect the scanning wiring. For repair, laser repair method is commonly used at present, which leads to complicated manufacturing process and increased manufacturing cost

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