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Double-walled carbon nanotube, bulk structure of the same, method and apparatus for producing them

A multi-layer carbon nanotube, carbon nanotube technology, applied in nanostructure manufacturing, carbon nanotubes, oriented carbon nanotubes and other directions, can solve the problems of difficult control, non-orientation, difficult to precise control, etc., to achieve mass production Effects of production, high growth rate, and life extension

Active Publication Date: 2008-11-26
NAT INST OF ADVANCED IND SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] However, when using the original arc discharge method, there are problems with the mixing of catalyst metals, low yield, and non-directionality, especially the fundamental problem that it is difficult to precisely control through the adjustment of the catalyst; in the rotary annealing method, there are low yields. High rate, non-directional, big problem not suitable for mass production
In addition, when the original CCVD method is used, the yield is high, but there are problems that the catalyst is inevitably mixed, there is no orientation, and the control of the catalyst is difficult.
[0007] In addition, in the gas phase flow method, although the yield is high and the orientation control is possible, the mixing of the catalyst cannot be avoided, and there is a problem that the control is difficult.

Method used

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  • Double-walled carbon nanotube, bulk structure of the same, method and apparatus for producing them
  • Double-walled carbon nanotube, bulk structure of the same, method and apparatus for producing them
  • Double-walled carbon nanotube, bulk structure of the same, method and apparatus for producing them

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0173] Carbon nanotubes were grown by the CVD method under the following conditions.

[0174] Carbon compound: Ethylene, supply speed 200sccm

[0175] Atmosphere (Pa): Mixed gas of helium and hydrogen, supply speed 2000sccm

[0176] Pressure: atmospheric pressure

[0177] Water vapor addition amount (ppm): 300ppm

[0178] Reaction temperature (°C): 750°C

[0179] Response time (minutes): 30 minutes

[0180] Metal catalyst (existing amount): Iron thin film, thickness 1.69nm

[0181] Substrate: silicon wafer

[0182] In addition, the disposition of the catalyst on the substrate was vapor-deposited using a sputtering vapor-deposition apparatus.

[0183] Fig. 10 shows the appearance of the monolithic structure of vertically aligned double-layered carbon nanotubes grown according to the above conditions. The front in the figure is a ruler. A vertically oriented bilayer carbon nanotube film with a height of 2.2 mm is grown on the underlying silicon wafer. The SEM image of t...

Embodiment 2

[0186] Carbon nanotubes were grown by the CVD method under the following conditions.

[0187] Carbon compound: Ethylene, supply speed 100sccm

[0188] Atmosphere (Gas): Helium, hydrogen mixed gas, supply speed 1000sccm

[0189] Pressure: atmospheric pressure

[0190] Water vapor addition amount (ppm): 300ppm

[0191] Reaction temperature (°C): 750°C

[0192] Response time (minutes): 10 minutes

[0193] Metal catalyst (existing amount): Iron thin film, thickness 1.69nm

[0194] Substrate: silicon wafer

[0195] In addition, the disposition of the catalyst on the substrate was performed by sputtering vapor deposition.

[0196] Figures 12 to 14 show that the vertically aligned double-layered carbon nanotubes manufactured in Example 2 are peeled off from the substrate with a dot needle combination, and the sample dispersed in the solution is placed on the grid of an electron microscope (TEM), Photographs observed with an electron microscope (TEM). It is known that no catal...

Embodiment 3

[0201] Carbon nanotubes were grown by the CVD method under the following conditions.

[0202] Carbon compound: Ethylene, supply speed 100sccm

[0203] Atmosphere (Gas): Mixed gas of helium and hydrogen, supply speed 1000sccm

[0204] Pressure: atmospheric pressure

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Abstract

Disclosed is an aligned double-walled carbon nanotube bulk structure which comprises multiple aligned double-walled carbon nanotubes and has a height of 0.1 [mu]m or more. In the bulk structure, the double-walled carbon nanotubes can be produced by chemical vapor deposition (CVD) in the presence of a metal catalyst having a controlled particle size and a controlled thickness, preferably in the presence of water. It becomes possible to provide a double-walled carbon nanotube which is free from the catalyst contamination, has a high purity, is easy to control the alignment or growth, can be formed through the formation of a bulk structure, and has an excellent electron-emitting property (particularly, a bulk structure of aligned, double-walled carbon nanotubes) and also provide a technique for production of the carbon nanotube.

Description

technical field [0001] The invention of the present application relates to double-layered carbon nanotubes and aligned double-layered carbon nanotube monolithic structures and their manufacturing methods. Tubes and monolithic structures of aligned double-walled carbon nanotubes and methods for producing them. Background technique [0002] Yield, quality, use, and mass production of carbon nanotubes (CNTs), which are expected for the development of functional materials such as new electronic device materials and electronic devices, optical device materials, conductive materials, and bio-related materials Efficiency and manufacturing methods are discussed in depth. [0003] In the presence of a metal catalyst and in the presence of water vapor in the reaction atmosphere, the inventors of the present invention produced a single-walled carbon nanotube with a high specific surface area and high purity, and a remarkably enlarged single-walled carbon nanotube and its monolithic as...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B31/02B01J20/20B82B3/00H01G9/058H01J1/304H01M4/02H01M4/58H01M4/96H01M10/40H01M12/06B82B1/00B82Y30/00B82Y40/00B82Y99/00H01G11/22H01G11/24H01G11/26H01G11/36H01G11/86H01J31/12H01M4/133H01M4/587H01M4/86H01M4/88H01M10/05
CPCC01B2202/34C01B2202/04Y02E60/50H01J1/304C01B2202/36C01B2202/08Y02E60/122B01J23/28Y02E60/13H01M10/052C01B31/0233H01G9/058B82Y30/00Y02E60/12B82Y10/00H01M4/96H01J2201/30469B01J20/20H01G11/36H01M4/587B82Y40/00B01J23/745B01J20/205B01J37/347B01J23/75C01B32/162Y10T428/2918Y10T428/30Y02E60/10
Inventor 畠贤治山田健郎汤村守雄饭岛澄男
Owner NAT INST OF ADVANCED IND SCI & TECH
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