Sub-wave length embedded type grating structure polarizing sheet and manufacturing method thereof

A grating structure and embedded technology, which is applied in the direction of polarizing elements, microlithography exposure equipment, photolithography exposure equipment, etc., can solve the problems of unsuitable industrial application, low production efficiency, high cost, etc., and achieve high TM light transmission Efficiency, simple production process, high extinction ratio effect

Active Publication Date: 2009-03-04
SUZHOU UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The grating with such a small processing cycle can use electron beam exposure technology and ion etching technology. The main problems are: low production efficiency, small area (a few centimeters), and high cost. It cannot be used in industrial applications at present.

Method used

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  • Sub-wave length embedded type grating structure polarizing sheet and manufacturing method thereof
  • Sub-wave length embedded type grating structure polarizing sheet and manufacturing method thereof
  • Sub-wave length embedded type grating structure polarizing sheet and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] See attached figure 2 , Is a schematic diagram of a polarizer with a sub-wavelength embedded grating structure.

[0042] The transparent substrate 22 is made of glass or plastic film and has a thickness of 12-150um. The plastic may be polycarbonate (PC), polyvinyl chloride (PVC), polyester (PET), polymethyl methacrylate (PMMA) or polypropylene (BOPP).

[0043] The refractive index of the high refractive index medium layer 23 is greater than the refractive index of the substrate.

[0044] The high refractive index dielectric layer 23 can be TiO 2 , Ta 2 O 5 , ZnS and so on.

[0045] The metal layer 24 may be a layer of gold, silver, copper, or aluminum.

[0046]The dielectric grating 25 is made of plastic, and the plastic may be polycarbonate (PC), polyvinyl chloride (PVC), polyester (PET), polymethyl methacrylate (PMMA) or polypropylene (BOPP).

[0047] The cover layer 26 may be CaF 2 Or plastic or resin coating.

[0048] Among them, the period p of the dielectric grating ...

Embodiment 2

[0060] See figure 2 , Change the refractive index of the high refractive index medium layer, the refractive index of the medium cover layer, and the height of the metal layer in the first embodiment. The refractive index of the high refractive index dielectric layer 23 is 2.2, the dielectric covering layer 26 is CaF2, the refractive index is 1.4, and the height of the metal layer is h3=0.07um. The incident light 21 is visible light with a wavelength of 400nm-700nm and an incident angle of 0 degrees; the substrate 22 is a polyester film (PET) with a refractive index of 1.48; the metal layer 24 is aluminum; and the dielectric grating 25 is PMMA with a refractive index of 1.48. The other structural parameters of the polarizer are as follows: the substrate thickness is 1000um, the high refractive index dielectric layer thickness h1 is 0.05um, the height of the dielectric grating h2=0.1um, the thickness of the dielectric cover layer h4=0.1um, and the period of the dielectric grating p...

Embodiment 3

[0063] The thickness h4 of the dielectric covering layer in the first embodiment is changed, and the other parameters remain unchanged. When the incident wavelength is 400nm, the thickness of the dielectric covering layer h4 affects the transmission efficiency and extinction ratio of TM light as Figure 5 , Figure 6 Shown. With the increase of h4, the transmission efficiency of TM light periodically changes in the range of 87.0% to 91.6%, and the extinction ratio changes periodically in the range of 4.0E4 to 10.0E4. It can be seen that the medium cover layer can modulate the transmission efficiency of the polarizer.

[0064] Considering that the thickness of the dielectric cover layer is too thick, the thickness of the polarizer will increase, thereby increasing the difficulty of integrating the polarizer with other optical devices. Generally, the thickness of the dielectric cover layer corresponding to the first peak of the transmission efficiency of TM light is selected.

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Abstract

The invention discloses a sub-wavelength buried type grating structure polaroid sheet which comprises a transparent substrate, a medium grating, a first metal layer and a second metal layer; wherein, the medium grating is provided with ridges and grooves, and the ridges and the grooves are periodically and alternately arranged; the first metal layer is covered on the spines of the medium grating; the second metal grating is covered on the grooves of the medium grating; and the period of the medium grating is smaller than the wavelength of incident light. The polaroid sheet is characterized in that the upper surfaces of the top parts of the first metal layer and the second metal layer are covered with medium covering layers, a high refractive index medium layer is arranged between the transparent substrate and the medium grating, and the refractive index of the high refractive index medium layer is between the range of 1.6 to 2.4. The medium covering layers can modulate the transmission efficiency of the polaroid sheet as well as protect the metal layers so as to prevent the metal layers from being oxidized and damaged in assembly. The polaroid sheet has high transmission efficiency, high extinction ratio and wide range of incident angles at the whole visible band.

Description

Technical field [0001] The invention relates to a polarizer suitable for the visible light band, in particular to a polarizer with a sub-wavelength embedded grating structure, which can be applied to the fields of liquid crystal display, optical communication and the like. Background technique [0002] Polarizer is a very important optical component in liquid crystal display, optical measurement, optical communication and other systems, and has a very broad market. These systems require polarizers with a high extinction ratio, a wide range of incident angles and a very compact volume. The traditional polarizer is too large, the manufacturing process is complicated, and only has a large extinction ratio in a small wavelength range, which can no longer meet the requirements of the display industry for lightweight, ultra-thin, and low-cost. Therefore, how to design a polarizer that is compact, easy to process, and cost-effective has become the trend of research and development in th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/30G03F7/20
Inventor 周云陈林森叶燕浦东林申溯周小红魏国军解正东
Owner SUZHOU UNIV
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