Infrared dual-band window protection film and manufacturing method thereof

Abstract

The invention relates to a dual waveband infrared window protection film and a manufacturing method thereof. The protection film is a film system consisting of a substrate, an intermediate protection combined film and an outermost layer protection film; the intermediate protection combined film consists of a bottom layer film which is a germanium carbide film and an upper layer film which is a diamond-like film or consists of a bottom layer film which is the diamond-like film and an upper layer film which is the germanium carbide film; and the outermost layer protection film is the diamond-like film. The manufacturing method comprises the following steps: determining the substrate, selecting the materials of the bottom layer film, the upper layer film and the outmost layer protection film, optimizing the film system and the like. The dual waveband infrared window protection film has the advantages of high light transmittance, being capable of resisting damages caused by severe environmental factors such as blown sand, sea water, high speed, salt mist and the like, high shock resistance, and improving the overall rigidity of the film system, as well as good process controllability and good process repeatability.

Description

Technical field: [0001] The invention relates to an infrared dual-band window protective film and a manufacturing method thereof, which belongs to the technical field of optical thin films, and is particularly suitable for common window optical systems. Background technique: [0002] With the changes in the application environment of optical system equipment and devices, especially high-precision optoelectronic systems are developing towards multi-band integration, such as field operations, especially in military and other fields, the application of some common-window optical systems is becoming more and more Among them, the optical system with a common window of mid-wave infrared (3-5 μm) and long-wave infrared (8-12 μm) has the broadest application prospects in the fields of guidance, tracking, and warning. Compared with the single-band infrared system, the dual-band infrared system is easier to distinguish small nearby targets (such as birds) from large distant targets, w...

AI Technical Summary

Problems solved by technology

The advantage of this infrared dual-band window protection film is that it has a high transmittance, and the disadvantages are:

[0006] ① Poor protection effect: Since only a hard film (diamond-like film) with a thickness of less than 100nm is plated, the hardness of the film is not high, and the ability to resist damage in harsh environments is poor;

[0007] ②Complicated process flow: At least two kinds of equipment are required for plating in the process, and the process flow is complicated

The advantage of this infrared dual-band window protection film is that the protection effect is excellent, and the disadvantages are:

[0009] ①Low transmittance: the average transmittance in medium-wave infrared and long-wave infrared can only reach 80%;

[0010] ②High cost and poor environmental protection: BP film needs to use two highly toxic gases, borane and phosphine, during the plating process. Improper treatment will cause environmental pollution, high equipment fixed investment and maintenance costs

[0012] ①Poor process repeatability: When the germanium carbide film is deposited by chemical vapor deposition, the refractive index control stability is poor, which directly affects the process repeatability; The germanium carbide film process is out of control;

[0013] ②High cost and poor environmental protection: Germanium carbide film needs to use germane, a highly toxic gas, during the plating process. Improper treatment will cause environmental pollution, high equipment investment and maintenance costs

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