Graphite matrix flawless TaC coating and manufacturing method thereof
A crack-free and coating technology, which is applied in the manufacture of crack-free TaC coatings on graphite substrates and the preparation of high-performance coatings, can solve problems such as low air resistance, cracks, and cracks in the coating. Achieve the effect of improving the ability of anti-corrosion and anti-diffusion, good thermal shock resistance and simple process technology
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Embodiment 1
[0025] See the process flow figure 1 , take the density higher than 1.80g / cm 3 High-purity graphite is used as the base material, cut into Φ50mm×7mm samples, successively use 200 # 、400 # 、1000 # Grind and polish with alumina water-resistant sandpaper, wash with ultrasonic waves for 30-60 minutes, take it out and dry it in an oven at 130°C for 2 hours, weigh it, put it into a chemical vapor deposition furnace; vacuumize to below 50Pa, and heat to 1300°C; Simultaneous access to C 3 h 6 , TaCl 5 , Trichloromethylsilane (CH 3 SiCl 3 ), hydrogen and diluent Ar gas, where TaCl 5 , Trichloromethylsilane (CH 3 SiCl 3 ) is brought in by Ar gas, the furnace pressure is maintained at 2000Pa, and the SiC-TaC co-deposition coating is deposited. After 10 hours, the thickness of the SiC-TaC co-deposition coating is 23 μm (the structure is as follows figure 2 ); stop feeding trichloromethylsilane, pass into C 3 h6 , TaCl 5 , hydrogen and diluent Ar gas, keep the furnace pressur...
Embodiment 2
[0027] See the process flow figure 1 , take the density higher than 1.80g / cm 3 High-purity graphite is used as the base material, cut into Φ150mm×7mm samples, successively use 200 # 、400 # 、1000 # Grind and polish with alumina water-resistant sandpaper, wash with ultrasonic waves for 30-60 minutes, take it out and dry it in an oven at 130°C for 2 hours, weigh it, put it into a chemical vapor deposition furnace; vacuumize to below 50Pa, and heat to 970°C; ① Simultaneous access to C 3 h 6 , TaCl 5 , Trichloromethylsilane (CH 3 SiCl 3 ), hydrogen and diluent Ar gas, where TaCl 5 , Trichloromethylsilane (CH 3 SiCl 3 ) is brought in by Ar gas, the furnace pressure is kept at 2000-3000Pa, and the SiC-TaC co-deposited coating is deposited for 10 hours, and the thickness of the SiC-TaC co-deposited coating is 50 μm; 3 h 6 , TaCl 5 , hydrogen and dilute Ar gas, the furnace pressure is kept below 3000Pa, and the TaC coating is deposited. After 2 hours of deposition, the thi...
Embodiment 3
[0029] see figure 1 , take the density higher than 1.80g / cm 3 High-purity graphite is used as the base material, cut into Φ150mm×7mm samples, successively use 200 # 、400 # 、1000 # Grind and polish with alumina water-resistant sandpaper, wash with ultrasonic waves for 30-60 minutes, take it out and dry it in an oven at 130°C for 2 hours, weigh it, and put it into a chemical vapor deposition furnace; vacuumize it to below 50Pa, and heat it to 900°C. (1) Simultaneous access to C 3 h 6 , TaCl 5 , Trichloromethylsilane (CH 3 SiCl 3 ), hydrogen and diluent Ar gas, where TaCl 5 , Trichloromethylsilane (CH 3 SiCl 3 ) is brought in by Ar gas, the furnace pressure is maintained at 2000-3000Pa, and the SiC-TaC co-deposition coating is deposited for 20 hours, and the thickness of the SiC-TaC co-deposition coating is 30 μm. (2) consists of the following steps, ① stop feeding trichloromethylsilane, feed C 3 h 6 , TaCl 5 , hydrogen and diluent Ar gas, the furnace pressure is ke...
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