Method for activating magnesium doping gallium nitride base material and LED P-type gallium nitride
A gallium nitride-based, nitrogen-based technology, which is applied in the manufacture of semiconductor devices, electrical components, semiconductor/solid-state devices, etc., can solve the problems of GaN damage and failure, and achieve the effect of reducing negative effects and improving doping efficiency
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0028] Below in conjunction with accompanying drawing and specific embodiment the present invention is described in further detail:
[0029] Such as figure 1 As shown, the single-layer Mg-doped GaN-based materials are from bottom to top: sapphire substrate 1, buffer layer 2, non-doped GaN (thickness more than 1 micron) 3, GaN:Mg (thickness greater than 300 nanometers) 4 .
[0030] refer to figure 2 , the above-mentioned Mg-doped GaN-based material is specifically processed as follows:
[0031] 1) Cleaning treatment of Mg-doped GaN-based material samples. First, the oxide layer and contamination on the surface of the sapphire substrate 1 and GaN:Mg4 are removed with a reducing liquid, and then the surface oil is further removed with an organic solvent, and then the GaN-based material sample is washed with deionized water.
[0032] 2) ICP processing. The reaction atmosphere is oxygen, the source power of the ICP can be adjusted between 100-500W, the bias power is 50-200W, t...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com