Structure of nanometer line cold-cathode electron source array with grid and method for producing the same as well as application of flat panel display
A manufacturing method and nanowire technology are applied in cold cathode manufacturing, electrode system manufacturing, discharge tube/lamp manufacturing, etc., to achieve the effects of high controllability and simple process
Active Publication Date: 2009-07-29
SUN YAT SEN UNIV
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The invention discloses a structure of a nano-wire cold cathode electron source array with a grid electrode, and a production method and an application thereof in flat panel display. The electron source array structure comprises a substrate, a cathode electrode strip and a grid electrode strip which are mutually crossly arranged and produced on the substrate, an insulating layer between a cathode and the grid electrode, and a nano-wire cold cathode array produced on the cathode electrode strip. The electron source array structure is produced by adopting a method combining a film micro-processing technology and a self-assembly growth technology. In the method, a nano-wire cold cathode is made by adopting a direct oxidation method without catalyst. In addition, a covering layer is produced on the cathode for protecting a source material required for the growth of nano-wires and limiting the growth of the nano-wires in a region close to the grid electrode. The electron source array structure adopts the nano-wires as the cold cathode, has simple production method and technology as well as high controllability, and can be applied to panel display devices of field emission.
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Discharge tube/lamp detailsCold cathode manufacture
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