P-type semiconductor material, semiconductor device, organic electroluminescent device, and method for producing p-type semiconductor material
A manufacturing method and semiconductor technology, which are used in the manufacture of semiconductor/solid-state devices, semiconductor devices, electroluminescent light sources, etc., can solve problems such as loss of conductivity and inability to use, and achieve the effect of improving luminous brightness
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Embodiment 1
[0062] In Example 1, an epitaxial film of Ag-doped ZnSe was formed on a p-GaAs substrate to form a semiconductor element.
[0063] The evaporator is used to reach a vacuum of 1×10 -8 Torr's evaporator. Heat the BN crucible with 1g of ZnSe raw material to 830°C, add 0.1g of Ag 2 The BN crucible of Se was heated to 775°C. On the other hand, the temperature of the p-GaAs substrate was raised to 250°C with an IR lamp (infrared lamp), and the gate under the substrate was opened to form a film.
[0064] Epitaxial growth was confirmed by in-plane X-ray diffraction and transmission electron microscopy.
[0065] The film thickness of the epitaxial film measured by a stylus height gauge was 400 nm, and the chemical composition analyzed by ICP method was Zn:Se:Ag=49.4:50.2:0.33 (at%). In addition, the Ag concentration analyzed by the SIMS method was 1×10 20 cm -3 , uniform in the film thickness direction. In addition, the relative resistivity is 6.8×10 4 Ωc m. Such as Figure 4 ...
Embodiment 2
[0067] In Example 2, an Ag-doped ZnSe film was formed on an ITO-attached glass substrate to form a semiconductor element. Film-forming conditions are the same as in Example 1.
[0068] The ZnSe film thickness measured by a stylus height gauge is 400 nm, and the chemical composition analyzed by ICP method is Zn:Se:Ag=49.4:50.2:0.33 (at%). In addition, the Ag concentration analyzed by the SIMS method was 1×10 20 cm -3 , uniform in the film thickness direction. Observation of the cross section by TEM confirmed the columnar particle structure. The work function measured by ultraviolet electron spectroscopy was 6.3 eV. In addition, the relative resistivity is 6.8×10 4 Ωc m. As in Embodiment 1, the current-voltage characteristics in the film thickness direction are good.
Embodiment 3
[0070] In Example 3, an epitaxial film of Ag-doped ZnSe was formed on a p-GaAs substrate to form a semiconductor element.
[0071] The evaporator is used to reach a vacuum of 1×10 -8 Torr's evaporator. Heat the BN crucible with 1g of ZnSe raw material to 830°C, add 0.1g of Ag 2 The BN crucible of Se was heated to 775°C. On the other hand, the temperature of the p-GaAs substrate was raised to 250°C with an IR lamp (infrared lamp), and the gate under the substrate was opened to form a film.
[0072] Epitaxial growth was confirmed by an in-plane X-ray diffraction method and a transmission electron microscope. The film thickness of the Ag-doped ZnSe film measured by a stylus altimeter is 400 nm, and the chemical composition analyzed by ICP method is Zn:Se:Ag=49.7:50.2:0.08 (at%). In addition, the Ag concentration analyzed by the SIMS method was 3×10 19 cm -3 , uniform in the film thickness direction. The work function measured by ultraviolet electron spectroscopy was 6.3 eV....
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