Method for preparing boron, carbon and nitrogen hard coating
A hard coating, boron carbon nitride technology, applied in the field of preparing nano-composite boron carbon nitrogen hard coating, can solve the problems of low content, low plasma density and ion energy, low ionization rate and the like
Inactive Publication Date: 2009-09-09
XI AN JIAOTONG UNIV
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Problems solved by technology
At present, the preparation method of BCN coating is mainly magnetron sputtering method. However, due to the low ionization rate of conventional magnetron sputtering, the plasma density and ion energy in the reaction chamber are low, and the sp in the prepared BCN coating 3 The content of B-N bonds is not high, and the coating is often amorphous
Therefore, the hardness of the coating is low, the bonding force is not high, and the application effect of the coating is not ideal
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[0019] The present invention is described in further detail below in conjunction with accompanying drawing:
[0020] see figure 1 , 2 , 3, a kind of method for preparing boron carbon nitrogen hard coating, this method comprises the following steps: (1) the high-speed steel (W18Cr4V) plate material of routine heat treatment (HRC62) is cut into 16mm * 16mm * 6mm and φ 24 * 9mm The sample is used as the matrix matrix, after the surface is degreased, polished, and ultrasonically cleaned with acetone, it is dried with a hot air blower for later use;
[0021] (2) Put the pretreated substrate into the arc-enhanced magnetron sputtering ion coating equipment. like figure 1 As shown, the arc-enhanced magnetron sputtering coating equipment at least includes a vacuum chamber 1, a turret 2, a bias voltage 3, a turret rod 4, and a flat target B 4 C 5, permanent magnet 6, column arc 7, heater 8, pump group 9, base body is placed on the turret bar 4, and the turret bar 4 can rotate with t...
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Abstract
The invention discloses a method for preparing boron, carbon and nitrogen hard coating, which comprises the following steps: placing pretreated base body on a rotating stand rod of electric arc strengthening magnetron sputtering ion plating equipment, and placing a plane B4C target on the inner wall of a furnace body by adopting the plane toward-target way; leading argon into a vacuum chamber, cleaning the vacuum chamber and the pretreated base body; plating a Ti base layer on the surface of the base body after the cleanness, and then plating a TiN transition layer; preparing a TiBCN transition layer on the basis of the formation of the TiN transition layer, and preparing the boron, carbon and nitrogen coating on the TiBCN transition layer of the surface of the base body. The boron, carbon and nitrogen coating prepared by the method adopts a composite structure composed of nanocrystalline and amorphous, the hardness of the boron, carbon and nitrogen coating reaches up to 32GPa, the membrane base combination force reaches 45N, the friction coefficient is about 0.02-0.05 in room temperature and air environment when the friction pair is Si3N4, and the boron, carbon and nitrogen coating has better friction reduction and friction resistance performances.
Description
Technical field: [0001] The invention belongs to the field of coating material preparation, and further relates to a method for preparing a nanocomposite boron carbon nitrogen (BCN) hard coating by using an arc-enhanced magnetron sputtering method. Background technique: [0002] Early studies have shown that carbon nitride (CN) coatings and cubic boron nitride (c-BN) coatings have excellent properties such as high hardness and low friction coefficient, and have great application potential in the field of surface modification for wear resistance and antifriction. However, the thermal stability and oxidation resistance of the CN coating will deteriorate after 500 °C. Although the thermal stability and oxidation resistance of the c-BN coating are as high as 1000 °C, it has better performance at high temperatures, but the coating There is a large residual stress during the preparation process, and the coating is easy to peel off early during use. These deficiencies limit the fu...
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IPC IPC(8): C23C14/06C23C14/35C23C14/02
Inventor 马胜利陈向阳
Owner XI AN JIAOTONG UNIV