Ultra-hard carbon film and preparation method thereof

A carbon film and superhard technology, applied in the field of superhard carbon film and its preparation, can solve the problems of weak film bearing capacity, limited application, high reaction temperature, etc., achieve low friction coefficient and wear rate, excellent friction reduction and durability Grinding performance and the effect of improving service life

Active Publication Date: 2009-10-14
ZHEJIANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, since the DLC film is mainly obtained by chemical vapor deposition (CVD), a relatively high reaction temperature (800-1200°C) is required, which has a great influence on the performance of the substrate.
Moreover, since the DLC film is sp 3 The main phase structure component has a high internal stress (7 ~ 12GPa), resulting in poor bonding force between the film and the substrate interface, weak film load capacity (<20N), and it is difficult to prepare a thicker coating, which limits its application in engineering. application on

Method used

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0017] The superhard carbon film is prepared by unbalanced magnetron sputtering method, and the steps are as follows:

[0018] 1) Place pure graphite targets and metal Ti targets in four directions perpendicular to the horizontal plane and at 90 degrees to each other. The rotating speed of the turret is 4rpm, and the distance between the substrate and the target is adjusted to 12cm;

[0019] 2) Vacuumize the reaction chamber to 3.0×10 -4 Pa, argon gas with a purity of 99.99% is introduced, and the flow rate of the argon gas is controlled at 30 sccm. Clean the target and substrate by sputtering with a titanium target current of 0.3A and a bias voltage of 500V for 30 minutes;

[0020] 3) Control the pure argon gas flow rate to 40 sccm, deposit a pure Ti bonding layer on the substrate with a titanium target current of 5A and a bias voltage of 70V for 5min; then gradually reduce the current of the two titanium targets from 5A to 0, and simultaneously The current of each graphit...

Embodiment 2

[0023] The superhard carbon film is prepared by unbalanced magnetron sputtering method, and the steps are as follows:

[0024] 1) Place pure graphite targets and metal Ti targets in four directions perpendicular to the horizontal plane and at 90 degrees to each other, and arrange the graphite targets and metal Ti targets alternately; The rotating speed of the turret is 4rpm, and the distance between the substrate and the target is adjusted to 12cm;

[0025] 2) Vacuumize the reaction chamber to 3.0×10 -4 Pa, argon gas with a purity of 99.99% is introduced, and the flow rate of the argon gas is controlled at 30 sccm. Clean the target and substrate by sputtering with a titanium target current of 0.3A and a bias voltage of 500V for 30 minutes;

[0026] 3) Control the pure argon gas flow rate to 30 sccm, deposit a pure Ti bonding layer on the substrate with a titanium target current of 5A and a bias voltage of 60V for 5min; then gradually reduce the current of the two titanium ta...

Embodiment 3

[0029] The superhard carbon film is prepared by unbalanced magnetron sputtering method, and the steps are as follows:

[0030] 1) Place pure graphite targets and metal Ti targets in four directions perpendicular to the horizontal plane and at 90 degrees to each other. The rotating speed of the turret is 4rpm, and the distance between the substrate and the target is adjusted to 12cm;

[0031] 2) Vacuumize the reaction chamber to 3.0×10 -4 Pa, argon gas with a purity of 99.99% is introduced, and the flow rate of the argon gas is controlled at 30 sccm. Clean the target and substrate by sputtering with a titanium target current of 0.3A and a bias voltage of 500V for 30 minutes;

[0032] 3) Control the pure argon gas flow rate to 20 sccm, deposit a pure Ti bonding layer on the substrate with a titanium target current of 5A and a bias voltage of 55V for 5 minutes; then gradually reduce the current of the two titanium targets from 5A to 0 within 30 minutes, and then At the same ti...

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Abstract

The invention discloses an ultra-hard carbon film which is formed by a substrate, a pure Ti binding layer, a Ti plus C composite gradient transition layer and an amorphous pure carbon film layer mainly taking the sp structure, and prepared by adopting an unbalanced magnetron sputtering method. The binding force between the film and the substrate of the ultra-hard carbon film is significantly improved at the pure Ti binding layer and the Ti plus C composite gradient transition layer which are deposited on an alloy surface, the hardness of the amorphous pure carbon film layer mainly taking the sp structure can reach 41 to 53GPa, simultaneously, the carbon film contains lower internal stress, and the thickness of the ultra-hard carbon film is controllable. When dry friction experiment is implemented at atmospheric environment, the ultra-hard carbon film has extremely low friction coefficient and wear rate, presents excellent anti-frication and wear-resisting property, can be used for manufacturing protective films on the surface of spare parts of bearings and worm and gear and the like, and greatly prolongs the service life of the spare parts of machines.

Description

technical field [0001] The invention relates to a superhard carbon film and a preparation method thereof. Background technique [0002] Mechanical wear is one of the most important causes of material and component failure. According to statistics, 20-85% of the power of various machines is consumed due to friction during the operation process, and about 50% of the failure of mechanical equipment is due to wear failure. The loss caused by wear in the world is very huge. [0003] To improve the wear resistance of materials, the most commonly used methods are to modify the surface of materials or deposit wear-resistant protective films and coatings. Among them, the deposition of wear-resistant protective film can significantly improve the material properties. The traditional wear-resistant coatings on the surface of mechanical parts are mainly TiN films, and some TiAlN, CrAlTiN composite coatings or multilayer films based on TiN. These coatings significantly improve the wear...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B32B9/04B32B15/04B32B7/02C23C14/06C23C14/14C23C14/35C23C14/02C23C14/54
Inventor 涂江平洪春福王秀丽李瑞玲刘东光
Owner ZHEJIANG UNIV
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