High hardness and low friction Cr/CrCN gradient coating technology applicable to surface of profiled reed
A gradient coating, special-shaped reed technology, applied in the surface coating modification, special-shaped reed surface high hardness, low friction coefficient Cr/CrCN gradient coating technology field, can solve the actual working conditions of special-shaped reed complex, special-shaped The complex shape of the reed, the change of the toughness and elasticity of the reed body, etc., can achieve the effect of harmonizing the structure and function of the coating body, good toughness, and reducing the coating stress.
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Embodiment 1
[0036] The invention adopts the self-developed JW-500 arc ion enhanced reaction magnetron sputtering apparatus;
[0037] The target materials used for the deposited Cr layer are 2 magnetron Cr targets and 1 column arc Cr target, both of which have a purity of 99.99%;
[0038] The target material used for the deposition of CrCN gradient coating is 2 magnetron Cr targets, 2 magnetron C targets, 1 column arc Cr target, and its purity is 99.99%;
[0039] The deposition pressure is maintained at 0.35Pa during the deposition process of the CrCN gradient coating.
[0040] The deposition temperature is maintained at 200° C. during the deposition of the CrCN gradient coating.
[0041] The deposition bias voltage in the process of depositing the CrCN gradient coating is further selected at -100V, and the coating effect is the best.
[0042] The initial sputtering power of the Cr target is 3.6KW, which is reduced by 0.5KW every ten minutes until it is reduced to 1KW.
[0043] The init...
Embodiment 2
[0059] During the process of depositing CrCN gradient coating, the sputtering bias has great influence on the composition, uniformity and structure of the coating. The pre-plating treatment of this example special-shaped reed Cr / CrCN gradient coating is identical with embodiment 1 step (1), just change degreaser composition and be sodium carbonate 250g / L, sodium citrate 50g / L, active agent 4g / L, Sodium phosphate 60g / L, cleaned with ultrasonic agitation for 40 minutes; Bias backsplash cleaning is the same as embodiment 1 step (2), when other unmentioned conditions and parameters are the same as embodiment 1, change when deposition gradient CrCN layer Deposition bias, if selected as -50V, -150V and -200V, can control the composition, structure and microstructure of the CrCN gradient coating, and then realize the hardness, toughness, friction and wear properties of the Cr / CrCN gradient coating It can be adjusted within a certain range to meet the needs of different product uses.
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