Preparation method of high purity hydrogen

Abstract

The invention discloses a preparation method of hydrogen. The invention uses the hydrogen with the purity of 99.99% as raw material, adopts pressure and temperature pressure swing adsorption technology and utilizes the principle that the hydrogen separation coefficient of residual impurities in hydrogen such as N2, CH4 and the like is larger than that of the surface of adsorbents such as activatedcarbon, fine-pored silica gel and the like, to prepare hydrogen with the purity of more than 99.9999%. The process of the invention is characterized by energy-saving, environmental protection, safety, capability of large-scale production and convenient operation. The use of pressure and temperature pressure swing adsorption technology avoids the defect of the traditional technology that inert gassuch as nitrogen and the like in hydrogen are hard to remove, no discharge of three wastes is appeared, the coexist of oxygen and hydrogen is precluded and the method is safer and more reliable.

Description

technical field [0001] The present invention relates to a kind of hydrogen (H 2 ) preparation process, in particular to a method for preparing high-purity hydrogen using methanol cracking as a raw material, and performing secondary purification to prepare ultra-purity hydrogen. Background technique [0002] With the increasing level of science and technology, various technologies, equipment, and instruments are more dependent on high-performance and high-sensitivity electronic components. In the production process of electronic components, especially in the production of semiconductor devices, the purity of materials is the key. Higher requirements are constantly being placed on the purity of raw materials. Hydrogen is an indispensable reducing gas and protective gas in the manufacture of semiconductor electronic components. Therefore, the demand for hydrogen with a purity that meets the requirements of electronic production is increasing, and the supply cannot be met. Ult...

AI Technical Summary

Problems solved by technology

The cost of hydrogen production has been continuously reduced. Pressure swing adsorption technology has been used in the preparation of pure hydrogen, so that the purity of hydrogen can reach 99.95-99.995%, which creates a favorable foundation for further purification of hydrogen, but its purity still cannot meet the requirements of semiconductor electronic components. requirements

N in particular hydrogen 2 、CH 4 Impurities such as Pd are not easily removed by other conventional methods. Although the method of palladium diffusion is sufficient and effective, it is expensive and has a small output, so it cannot be used for high-pressure purification.

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