Five-bit radio-frequency MEMS phase shifter
A phase shifter and micro-electromechanical technology, which is applied in the field of high frequency band, can solve the problems of difficult electronic communication system supporting use, low number of phase shifters, low phase shift accuracy, etc., and achieves high phase shift accuracy and reliability. Simple processing technology and small step size
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[0012] Take a five-digit RF MEMS phase shifter with a frequency of 10GHz (X band) as an example: CPW signal line 1 (length×width×thickness) 5.7cm×100μm×2μm, the insulating layer 1-1 on it is 0.35 thick μm silicon dioxide (SiO 2 ), two CPW ground wires 2 (length×width×thickness) 5.7cm×400μm×2μm, the distance between the inner sides of the two ground wires and the signal line 1 is 107μm, and the groove in the middle of the two ground wires (length×depth) is 400μm×103μm; In order to meet the 10GHz operating frequency requirements, the MEMS metal beam 4 (length×width×thickness) is 320×94×1.0μm, and the holes 4-1 on it are processed by wet etching. The diameter of each hole is Φ5μm, the horizontal center distance of each hole is 9μm, and the longitudinal center distance is 7μm. The corresponding margins are 4μm and 2.5μm respectively. The initial gap between the lower surface of the metal beam 4 and the upper surface of the insulating layer 1-1 is 2.3μm. Polar plate 5-1 (length×widt...
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