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Carbon nanotube array organic pollutant sensor and application thereof

A technology of carbon nanotube arrays and organic pollutants, applied in the field of nanosensors, can solve the problems of loss of field effect selectivity and no field effect of detection objects, achieve sensitive and portable emergency monitoring, and improve the effect of identification and selectivity

Inactive Publication Date: 2010-05-05
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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  • Abstract
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  • Application Information

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Problems solved by technology

For randomly distributed network-like carbon nanotube films, due to the composition of metal tubes, if the film is too thick, it usually has no field effect at room temperature and loses the field effect selectivity for detectors

Method used

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  • Carbon nanotube array organic pollutant sensor and application thereof
  • Carbon nanotube array organic pollutant sensor and application thereof
  • Carbon nanotube array organic pollutant sensor and application thereof

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Embodiment approach

[0029] 1), using PdCl 2 As a raw material, the sample prepared in the first step of the step was mixed with PdCl 2 Mix it, put it in a high-temperature furnace, and pass it into hydrogen for reduction.

[0030] 2) Depositing a layer of Pd nanoparticles on the sample of aligned carbon tubes by direct physical vapor deposition.

[0031] Finally, use the L-edit software to design the interdigitated electrodes, use electron beam exposure (EBL), ultraviolet lithography, focused ion beam deposition (FIB) and other micro-nano processing techniques for device microfabrication, and use metal thin film evaporation, sputtering and other means Deposit interdigitated electrodes. The figure shows that the width of the interdigitated electrode strips is 4 μm, and the spacing is 3 μm (such as Figure 4a shown).

[0032] The preferred version of the above-mentioned preparation method technical scheme is:

[0033] The catalyst adopted in the method for preparing aligned single-walled carbon ...

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Abstract

The invention discloses a carbon nanotube array organic pollutant sensor and an application thereof. The preparation method of the sensor comprises the following steps: firstly adopting chemical vapor deposition or AC electrophoresis methods to prepare directional single-walled carbon nanotube array with mixed metallicity and semiconductivity on substrate; then adopting overload current to burn up the carbon nanotube with metallicity in the carbon nanotube array, adopting metal nanoparticles to modify the obtained carbon nanotube array with semiconductivity; and finally photoetching interdigitated finger electrode or performing metal film deposition to prepare interdigitated finger electrode on the surface of the carbon nanotube array treated through the metal nanoparticles modification. The sensor of the invention completely has the carbon nanotube array structure with semiconductivity, has the property of realizing the field effect at room temperature, can increase the identity and selectivity of the elements for different organic molecules, and can be used for the sensitive detection of NO, NO2 and benzene series organic gas contaminations in and out of the room or in space.

Description

technical field [0001] The invention relates to a nanometer sensor and its application. The preparation process includes preparing an array of oriented single-walled carbon nanotubes, nanoparticle modification and micromachining, and can realize the detection of nitrogen oxide (NOX) pollutants, benzene series and other organic substances. The invention belongs to the technical field of carbon nanotubes. Background technique [0002] Nitrogen oxides (NOX) pollutants, mainly refer to nitrogen monoxide (NO), nitrogen dioxide (NO 2 ), nitrogen oxides can stimulate the lungs, cause changes in the structure of the lungs, and affect the function of the respiratory system. In addition, nitrogen oxides combined with water in the air will eventually be converted into nitric acid, which is one of the causes of acid rain. Most of the nitrogen oxides in the urban atmosphere come from fuel combustion, such as automobiles and industrial furnaces. Benzene series (BTEX) includes 8 compoun...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/04
Inventor 邢振远刘立伟宋仁升耿秀梅牛亮荣吉赞李伟伟
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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