Small-bore nuclear pore filter membrane and production method thereof
The technology of a nuclear pore filter membrane and production method is applied in the field of small-pore nuclear pore filter membrane and its production, which can solve the problems that columnar nuclear pore filter membranes cannot be produced, achieve low cost, easy operation, and increase the etching speed ratio Effect
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[0021] Below in conjunction with specific embodiment the production method of the small-aperture nuclear pore filter membrane of the present invention is described in detail:
[0022] Step 1: Use a high-energy linear accelerator to accelerate sulfur ions, and the accelerated sulfur ions enter the low-vacuum irradiation chamber through the ion velocity flow pipe, and directly irradiate on the film placed in the irradiation chamber in advance. The film is specifically 12 PET (polyethylene terephthalate, chemical formula: COC6H4COOCH2CH2O) plastic film between ~20 μm (in other application examples, the plastic film can also be replaced by other materials). Among them, in the process of penetrating the PET plastic film, the sulfide ion forms a columnar damage area (ie track) due to ionization.
[0023] Step 2: In an aerobic environment where the oxygen concentration is always not lower than 2 / 5, irradiate the film after sulfide ion irradiation with a high-pressure mercury lamp of ...
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