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Silver-gold alloy target material, manufacturing method and application thereof

A manufacturing method and alloy target technology, which is applied in metal material coating technology, ion implantation plating, coating, etc., can solve the problems of small grain size, expensive equipment, and reduced material purity, so as to achieve finer grain size and reduce The effect of manufacturing costs

Inactive Publication Date: 2010-08-18
SOLAR APPLIED MATERIALS TECHNOLOGY CORPORATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] 2. Small grain size;
[0011] (1) Adding a grain refiner: it will reduce the purity of the material;
[0012] (2) vibration casting (vibration casting): expensive equipment;

Method used

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  • Silver-gold alloy target material, manufacturing method and application thereof
  • Silver-gold alloy target material, manufacturing method and application thereof
  • Silver-gold alloy target material, manufacturing method and application thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0049] Take 1 kg of gold and 9 kg of silver into the crucible of an induction melting furnace, heat it to 1075 ° C to melt it; pour the molten soup in the crucible into a cylindrical mold, and wait for it to cool to about 800 ° C Hot forging, the compression ratio of hot forging is about 70%; cold rolling is carried out after the embryo body is cooled, and the rolling ratio is about 60%; the rolled embryo body is put into a heat treatment furnace at 600°C for about 1 Hours of recrystallization heat treatment; dimension machining after heat treatment to obtain silver-gold alloy targets.

[0050] Please see figure 2 , which is a photomicrograph showing the silver-gold alloy target obtained above (microscope model: Olympas BH, image processing software: Image-Pro Plus version 6.3), and the crystal grains of the silver-gold alloy target can be known The size is less than 250 μm.

Embodiment 2

[0052] Take 5kg of gold and 5kg of silver into a crucible of an induction melting furnace, heat it to 1125°C to melt it; pour the molten soup in the crucible into a cylindrical mold, and wait for it to cool to about 800°C Hot forging, the compression ratio of hot forging is about 75%; cold rolling is carried out after the embryo body is cooled, and the rolling ratio is about 65%; the rolled embryo body is put into a heat treatment furnace at 650°C for about 1 Hours of recrystallization heat treatment; mechanical processing after heat treatment.

[0053] Please see image 3 , which is a photomicrograph showing the silver-gold alloy target obtained above, and it can be known that the grain size of the silver-gold alloy target is less than 300 μm.

Embodiment 3

[0055]Take 9 kg of gold and 1 kg of silver into the crucible of an induction melting furnace, heat it to 1165°C to melt it; pour the molten soup into a cylindrical mold, and wait for it to cool to about 800°C for hot forging , the compression ratio of hot forging is about 80%; cold rolling is carried out after the embryo body is cooled, and the rolling ratio is about 65%; the embryo body after rolling is put into a heat treatment furnace at 700 ℃ for about 1 hour Crystallization heat treatment; mechanical processing after heat treatment.

[0056] It also undergoes the same analysis method as in the previous embodiment, and it is known that the grain size of the silver-gold alloy target is less than 300 μm.

[0057] The process conditions of the above-mentioned Examples 1-3 and the grain size of the obtained silver-gold alloy target are all sorted out as shown in Table 1 below:

[0058] Conditions and results of the silver-gold alloy target material in each embodiment of Table...

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Abstract

The invention discloses a silver-gold alloy target material, a manufacturing method and application thereof. The manufacturing method comprises the following steps: putting a target raw material into a melting furnace and heating to be melted; casting the melted melting soup; hot forging ingots formed after the casting; cold rolling blanks formed after the hot forging; and hot treating the blanks formed after the cold rolling to obtain the silver-gold alloy target material with small grains. Through the method provided by the invention, the target material has fine grains, and casting defects can be effectively removed, so that the target material can not produce the problems such as uneven dust particles and components in the sputtering process and the like.

Description

technical field [0001] The invention relates to a method for manufacturing a silver-gold alloy target, in particular to a method for manufacturing a target that can be operated in large quantities, effectively refines crystal grains, and has no shrinkage. Background technique [0002] Generally speaking, silver or gold are widely used to form thin layers of electrodes or reflective layers due to their good electrical conductivity and light reflectivity, and are even often used in films for electromagnetic wave shielding; In electronic components, semiconductor integrated circuits, optoelectronic components, optical recording media or electromagnetic wave shielding, the thin films of electrodes, reflective layers and shielding layers are generally formed by sputtering; the targets used for sputtering must have the following characteristics: [0003] 1. Uniform composition and structure; [0004] 2. Small grain size; [0005] 3. Few defects such as inclusions and voids; [...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C22C1/02C22C5/02C22C5/06C22C30/00C23C14/34
Inventor 王瑞郁林守贤
Owner SOLAR APPLIED MATERIALS TECHNOLOGY CORPORATION
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