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All solid state micro-opto-electro-mechanical gyro based on annular resonant cavity

A ring resonant cavity, micro-opto-electromechanical technology, applied in the direction of microstructure devices composed of deformable components, Sagnac effect gyroscopes, circuits, etc., can solve high cost, complex photoelectric signal processing of fiber optic gyroscopes, Difficult to integrate and other issues, to achieve the effect of reducing light loss, reducing light leakage, and facilitating miniaturization

Inactive Publication Date: 2011-08-31
ZHONGBEI UNIV
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  • Description
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Problems solved by technology

However, fiber optic gyroscopes require more complex photoelectric signal processing, are costly, are greatly affected by changes in environmental conditions such as temperature, and are not easy to integrate

Method used

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  • All solid state micro-opto-electro-mechanical gyro based on annular resonant cavity
  • All solid state micro-opto-electro-mechanical gyro based on annular resonant cavity

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example

[0030] Example: The present invention adopts SOI material as a whole, the top layer structure adopted is silicon material, the oxide layer is silicon dioxide, and the substrate layer is silicon. in:

[0031] (1) Vertical-cavity surface-emitting laser: The multilayer film structure of amorphous silicon (or amorphous silicon nitride) / silicon dioxide alternately grown by molecular beam epitaxy or plasma enhanced chemical vapor deposition (PECVD) is Distributed Bragg reflector (DBR), with the amorphous silicon carbide film sandwiched between the upper and lower Bragg reflectors as the middle light-emitting layer. The laser emits light to illuminate the input grating, and realizes the optical interconnection between the laser source and the ring resonant cavity.

[0032] (2) Resonance-enhanced detector: Firstly, the PECVD system is used to grow the SiO2 / Si mirror with high reflectivity on the silicon wafer, and then the bonding technology is used to bond to the active region of ...

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Abstract

The invention relates to an all solid state micro-opto-electro-mechanical gyro based on an annular cavity. The gyro comprises a vertical cavity surface transmitting laser, a resonant cavity strengthening type detector, an input raster, an output raster, an annular resonant cavity, an input and output optical waveguide, and a light dividing isolator, wherein the vertical cavity surface transmitting laser is integrated on a top silicon layer of SOI material and is formed by using a bonding technology of the silicon base chip and the III-V compound semiconductor base chip; and the resonant cavity strengthening type detector is integrated on an upper silicon layer of SOI material, and bonded into an active area of detecting matters of In, Ga, As and the like by applying the bonding technology. The all solid state micro-opto-electro-mechanical gyro is characterized in that the annular resonant cavity is in a circle shape; the input raster is integrated with the output raster through the light dividing isolator, the input and output optical waveguide and the annular resonant cavity. The invention is mainly applied to measuring the angular velocity of the outside, and can be applied to small satellites and even miniature satellites.

Description

technical field [0001] The invention belongs to the technical field of micro-optical electromechanical systems, and mainly relates to a micro-optical electromechanical gyroscope, in particular to an all-solid-state micro-optical electromechanical gyroscope based on a ring resonant cavity. Background technique [0002] With the wide application of global satellite positioning systems and the rapid development of high-tech, the development of modern inertial navigation systems requires inertial devices to be small in size, light in weight, low in power consumption, high in reliability and easy to integrate while ensuring high precision. Features. As the core component of the inertial navigation system, the gyro-inertial device is used in land, sea, air and space guidance, navigation and control technology fields such as land, sea, air and space guidance, navigation and control technology, as well as satellite attitude Control, camera stabilization, image stabilization, geodet...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/56G01C19/66B81B3/00
Inventor 熊继军严英占闫树斌沈三民张文栋刘俊薛晨阳吉喆王丽张宇光王晓倩徐鹏飞孟祥然李鹏邹江
Owner ZHONGBEI UNIV
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