Preparation process of superconductive planar circuit

Abstract

The invention discloses a preparation process of a superconductive planar circuit. The preparation process comprises the following steps: firstly, taking a substrate the surface of which is provided with a conductive layer and a superconductive thin film layer as required, and forming a circuit diagram consisting of photoresist on the surface of the conductive layer; secondly, etching the conductive layer and the superconductive layer into the circuit diagram through a dry etching method or a wet etching method to remove the photoresist on the surface of the circuit; thirdly, manually coatingthe photoresist at a position of the circuit, which needs to retain a conductive layer electrode, then baking; fourthly, etching the conductive layer through a dry etching method or a wet etching method, and removing the photoresist; and fifthly, obtaining the finished product. The process of the invention reduces the influence to the performance of a superconductive film, reduces photoetching steps and has the advantages of short period, low process complexity and less manufacturing cost.

Description

technical field [0001] The invention relates to the preparation of a superconducting planar circuit, which is a preparation process of a superconducting planar circuit. Background technique [0002] In the microwave frequency band below 10GHz, the microwave surface resistance of superconducting thin film materials is more than two orders of magnitude lower than that of ordinary metals, and it is also significantly lower than ordinary metal materials in the high frequency band. The excellent characteristics of superconducting thin film materials make superconducting technology have broad application prospects in the field of electronics. High-performance planar circuit devices can be prepared with superconducting materials, including superconducting resonators, filters, delay lines, delay line filters, and antennas. The Q value of the resonator made of superconducting thin film is as high as tens of thousands, which is much larger than that of ordinary metal resonators. Fil...

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Problems solved by technology

[0010] The above preparation steps require two photolithography and two etching, so two sets of photolithography templates (one electrode pattern template and one circuit pattern template) are required, which not only has a long process cycle, but also has high cost and high process complexity.

In addition, the second photolithography in the above preparation process is carried out on the surface of the superconducting layer, because the oxide superconducting thin film interacts with water and carbon dioxide (CO 2 ) contact is prone to chemical reactions, which will lead to the degradation of the performance of the superconducting film. The above manufacturing steps increase the possibility of defects in the superconducting circuit

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