Method for improving resolution of single-piezoelectric layer thin film acoustic wave sensor
A thin-film bulk acoustic wave and sensor technology, which is applied in the direction of material analysis, instruments, and scientific instruments using sound waves/ultrasonic waves/infrasonic waves. High, simple processing effect
Inactive Publication Date: 2012-01-04
CHONGQING UNIV
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Problems solved by technology
Since the bulk acoustic wave sensor with a double piezoelectric layer specially adds an active control piezoelectric layer, the acoustic energy compensation effect is very good, and the resolution of the sensor is greatly improved, but it is different from the conventional single piezoelectric layer thin film bulk acoustic wave sensor. Compared with the above thin-film bulk acoustic wave sensor with double piezoelectric layer, the processing technology is more complicated, the cost is higher, and the yield is lower
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[0020] The method for improving the resolution of a thin-film bulk acoustic wave sensor proposed by the present invention is applicable to a single piezoelectric layer thin-film bulk acoustic wave sensor. This sensor can be manufactured using silicon-based micromachining technology. The following is a typical process flow:
[0021] 1. Select a double-sided polished, moderately doped, (100) silicon wafer 1 with a resistivity of 2 to 4 Ω cm as the substrate, and thermally oxidize and deposit S on it. i o 2 Layer 2, with a thickness of about 300nm (such as figure 1 shown);
[0022] 2. Photoetching the front side once to form a photoresist pattern, evaporate a Pt electrode layer with a thickness of about 100nm on the substrate, remove the photoresist by wet method, and form a piezoelectric layer bottom electrode 3 pattern complementary to the photoresist pattern ( Such as figure 2 shown);
[0023] 3. Prepare the ZnO or AlN piezoelectric layer by sputtering, perform photolitho...
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Abstract
The invention relates to a method for improving the resolution of a single-piezoelectric layer thin film acoustic wave sensor, which is to add a feedback voltage that is obtained by applying a constant gain and a constant phase difference onto the current of the thin film acoustic wave sensor into an excitation voltage of the single-piezoelectric layer thin film acoustic wave sensor. In the invention, the addition of the feedback voltage into the excitation voltage of the thin film acoustic wave sensor compensates for part of acoustic energy loss of the thin film acoustic wave sensor and reduces the damping of the sensor, so the quality factor and quality resolution of the thin film acoustic wave sensor are improved. The active control technology-based method for improving the resolution of the single-piezoelectric layer thin film acoustic wave sensor can be used together with a passive sound insulation technique of the thin film acoustic wave sensor, and is applicable to extendable-thickness thin film acoustic wave sensors and thickness-shearing thin film acoustic wave sensors as well as quartz crystal micro balances.
Description
technical field [0001] The invention belongs to the field of micromechanical electronic systems (MEMS), and in particular relates to a film bulk acoustic resonator (FBAR) and a film bulk acoustic wave sensor. The method for improving the resolution of a bulk acoustic wave sensor proposed by it is also applicable to a quartz crystal microbalance (QCM) . Background technique [0002] As a general physical, chemical and biological sensor, the acoustic wave sensor has many advantages such as low cost, easy operation, fast speed, non-marking, high sensitivity, and large detection range. It is widely used in industrial process monitoring, environmental monitoring, clinical medical testing, Food safety inspection, toxic gas detection, drug development and other fields have broad application prospects. However, compared with analytical methods such as mass spectrometry, plasmon resonance, and ellipsometry, the resolution of acoustic wave sensors is relatively low, which limits its ...
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IPC IPC(8): G01N29/22G01N29/32
Inventor 贺学锋刘兴陈可万温志渝
Owner CHONGQING UNIV