Rare gas determination system based on quadrupole mass spectrometer
A rare gas and measurement system technology, which is applied to measurement devices, material analysis by electromagnetic means, instruments, etc., can solve the problems of cumbersome maintenance process, high cost and complex structure, and achieve simplified volume, low cost and simple structure. Effect
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[0019] In this embodiment, the rare gas helium test is taken as an example. The rare gas measurement system based on quadrupole mass spectrometry includes components: laser sample chamber 12, molecular vacuum pump 8, mechanical pump 9, ionization vacuum gauge 7, first zirconium aluminum getter Pump 6, the second zirconium aluminum suction pump 2, the first standard tank 4 (helium 3 standard gas is housed in this tank), the second standard tank 5 (helium 4 standard gas is housed in this tank), ion pump 1, Quadrupole mass spectrometer 3, first four-way pipe 31, second four-way pipe 32, first three-way pipe 21, second three-way pipe 22, third three-way pipe 23, high temperature furnace 10 and liquid nitrogen finger 11, The laser sample chamber 12 is connected to the first port 311 of the first four-way pipe 31 through the VCR pipeline, the valve B, the third three-way pipe 23, and the second three-way pipe 22 in turn. One port is connected to the liquid nitrogen finger through th...
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