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Technology for preparing high-purity nitrogen trifluoride by purifying nitrogen trifluoride through rectification and adsorption

A nitrogen trifluoride, high-purity technology, applied in the direction of nitrogen and non-metallic compounds, can solve problems such as environmental pollution, and achieve the effect of convenient use and reasonable design

Inactive Publication Date: 2011-06-22
天津东方宜信物流有限公司
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Problems solved by technology

This technology not only has reasonable process and simple preparation, but also has good product quality, and the carbon tetrafluoride impurity in the produced nitrogen trifluoride gas is reduced from 1.5%-2% to 5×10 -6 The following, and solve the problem of environmental pollution

Method used

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  • Technology for preparing high-purity nitrogen trifluoride by purifying nitrogen trifluoride through rectification and adsorption
  • Technology for preparing high-purity nitrogen trifluoride by purifying nitrogen trifluoride through rectification and adsorption

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Embodiment Construction

[0010] refer to figure 1 , glass bottle 1, water trap 2, sodium peroxide filled tower 3, sodium thiosulfate solution bottle 4, oxygen trap 5 in the air, nitrogen trifluoride trap 6 through the connecting pipeline 7 according to its system function Assembled into one body.

[0011] Nitrogen trifluoride purification system technical process: the anode gas crude nitrogen trifluoride obtained by electrolysis mainly contains nitrogen, oxygen, carbon monoxide, carbon dioxide, nitrous oxide, difluorohydrazine, tetrafluorohydrazine, carbon tetrafluoride, six Sulfur fluoride, silicon tetrafluoride, fluorine gas, hydrogen fluoride, water and other impurities. To remove these impurities, the anode gas was passed through a copper trap cooled to -78°C with methanol-dry ice, and then passed through a sodium fluoride tube heated to 100°C to remove hydrogen fluoride. Oxygen is adsorbed with activated carbon at low temperature. Put the crude nitrogen trifluoride into a 20L glass bottle 1 an...

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Abstract

The invention discloses a technology 1 for preparing high-purity nitrogen trifluoride by removing impurities contained in nitrogen trifluoride through a rectification method, mainly comprising an adsorption column, a heat exchanger E1, a low-temperature adsorption column, a heat exchanger E2, a heat exchanger E4, a heat exchanger E3, a medium-pressure rectifying tower, a heat exchanger E5, a low-pressure rectifying tower, a heat exchanger E6, a connection valve and a condenser which are assembled into an integer according to systemic functions through connecting pipelines. The invention has the advantages of reasonable design and convenience for use and is an ideal process technology for preparing the nitrogen trifluoride.

Description

Technical field [0001] The present invention relates to a process technology for the preparation of a chemical product-nitrogen trifluoride, especially a technology for preparing high-purity nitrogen trifluoride by rectification and adsorption purification of nitrogen trifluoride, which is suitable for chemical synthesis of high-purity nitrogen trifluoride nitrogen. Background technique [0002] At present, extracting and rectifying separation of nitrogen trifluoride and carbon tetrafluoride to prepare nitrogen trifluoride is to infiltrate nitrogen trifluoride (NF3) containing carbon tetrafluoride (CF4) impurity in zeolite 3A, 4A or 5A bed, with Nitrogen trifluoride is selectively adsorbed onto the bed, followed by desorption of nitrogen trifluoride from the bed, wherein the zeolite is ion-exchanged with an alkaline earth metal and heat-treated at 150-600° C. for 0.5-100 hours. This method cannot comprehensively remove impurities and takes a very long time. The removal of c...

Claims

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Application Information

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IPC IPC(8): C01B21/083
Inventor 李中元
Owner 天津东方宜信物流有限公司
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