Large-scale welding method for carbon nano tube devices

A technology of carbon nanotubes and welding methods, applied in the direction of nanotechnology, nanotechnology, nanostructure manufacturing, etc., can solve the problems of difficult process, difficult large-scale application, no welding, easy to damage electrodes, etc., to achieve large-scale effective welding, The effect of fast welding speed and high reliability

Inactive Publication Date: 2011-07-06
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology

However, many early manufacturing processes of carbon nanotube devices simply deposited carbon nanotubes on the surface of metal electrodes without reliable welding, which resulted in poor mechanical strength and high contact resistance between carbon nanotubes and electrodes.
These shortcomings hinder the practical application of carbon nanotubes in the field of micro-nano electronic devices
In order to achieve effective welding contact between carbon nanotubes and metal electrodes, many researchers have tried many methods, such as welding carbon nanotubes and metal electrodes at the contact area of ​​carbon nanotubes and metals by electron beam and ion beam irradiation, according to this The contact resistance of this method can be reduced by several orders of magnitude, but this method is not easy to realize large-scale application due to its difficult process.
In addition, the rapid thermal annealing method has also been proven to reduce contact resistance. In this method, the entire substrate including carbon nanotubes, patterned electrodes and other device components is placed in an ambient temperature as high as 600-800 ° C. This high temperature will Severely limits the optional use of other materials on the substrate
Recently, ultrasonic welding technology has realized welding between carbon nanotubes and metal electrodes. This welding method presses carbon nanotubes on the metal electrodes through an ultrasonic probe. Although this method can obtain lower contact resistance, the welding process is easy. damaged electrode
Therefore, this method has the same disadvantage, that is, only a single part can be welded at a time, and it cannot be applied to the manufacture of large-scale carbon nanotube devices.

Method used

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  • Large-scale welding method for carbon nano tube devices
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  • Large-scale welding method for carbon nano tube devices

Examples

Experimental program
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Effect test

Embodiment 1

[0020] Welding equipment and materials include: radio frequency induction heating system, wafer 15 and electrode 16, carbon nanotubes 17 deposited on the electrode, radio frequency heating system is composed of radio frequency power supply, water cooling system, heating coil, glass base, see figure 1 . The RF induction heating system consists of 4 parts: the RF power supply 11 provides the power required for heating, the cooling system 12 is used to cool the coil 13, the coil 13 is used to generate a changing magnetic field, and the glass base 14 is used to support the wafer 15 during welding. The water cooling system consists of a spiral tube covering the outer surface of the coil, and the coil is cooled by water flowing through the tube. In order to achieve the best heating effect, the configuration of the coil 13 varies with the electrode type, shape, size and thickness. The heating coil 13 is arranged according to the electrode pattern, and the electrode 16 is manufacture...

Embodiment 2

[0031] Embodiment 2 is the same as Embodiment 1, except that the array of electrodes to be welded is 200 pairs. From 200 pairs of electrode pairs, 20 pairs of electrode pairs are randomly selected for electrical testing. The comparison of resistance changes between electrode pairs before and after welding is as follows: Figure 5B shown. The results show that after welding, the average resistance between the electrode pairs drops to 1.21% of that before welding, and the welding consistency is good. This welding method is suitable for large-scale carbon nanotube welding.

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Abstract

The invention relates to a large-scale welding method for carbon nano tube devices. A carbon nano tube is deposited on a wafer including a graphical electrode by adopting a dielectrophoresis method, the wafer is placed on a carrying table of a radio-frequency induction heating system for heating for a short time, the wafer is cooled under the condition of vacuum or protective gas, a heating coil is set according to an electrode pattern. The welding method includes the following steps of: A. dispersing carbon nano tubes; B. connecting a positioning and orientating bridge of the nano tubes between an electrode pair; and C. connecting the carbon nano tubes with the electrode in a welding manner. The large-scale welding method has the advantages of adopting a radio-frequency induction heating method, being simple in process, fast in welding speed, good in repeatability and high in reliability, and being capable of realizing production on a large scale, and realizing large-scale effective welding of the wafer-level carbon nano tube devices.

Description

technical field [0001] The invention relates to a micro-nano manufacturing method, in particular to a large-scale welding method between carbon nanotubes and metal electrodes. Background technique [0002] Carbon nanotubes have great application potential due to their excellent electrical, mechanical and thermal properties. in micro-nano devices. Much of the current research on carbon nanotube devices is focused on the prototyping of devices, such as field-effect transistors and carbon nanotube-based sensors, aimed at replacing some components in current electronic circuits. In addition, carbon nanotubes can be used as interconnecting wires of circuits and play an extremely important role in nanoelectronic devices. Therefore, the contact and welding between carbon nanotubes and metal electrodes has become an important issue in the fabrication of carbon nanotube nanodevices. However, many early manufacturing processes of carbon nanotube devices simply deposited carbon nano...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B82B3/00
Inventor 甘志银严晗宋晓辉刘胜
Owner HUAZHONG UNIV OF SCI & TECH
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