Memory based on self-assembled QD (Quantum Dots) and preparation method thereof
A technology of self-organized quantum dots and memory, which is applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve the problems of long writing time and short life, and achieve improved device life, fast speed, and mature methods Effect
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[0038] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0039] The device material of the present invention is grown on solid source molecular beam epitaxy (MBE) equipment, and can also be grown by metal oxide chemical vapor deposition (MOCVD). exist figure 1 The device structure fabricated on the material structure shown is as follows figure 2 :
[0040] 1. The (100) GaAs semi-insulating substrate 1 is used to reduce substrate leakage current.
[0041] 2. Growth stress buffer layer 2 on GaAs semi-insulating substrate 1: This layer is an undoped semiconductor material, the purpose is to obtain a high-quality epitaxial layer and reduce the influence of defects in the substrate on the electronic channel layer , the thickness needs above. A thicker stress buffer layer will...
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