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Nanofluidic channels with integrated charge sensors and methods based thereon

一种电荷传感器、纳米流体的技术，应用在检测纳米流体通道局部溶液电势,带电生物或化学物类的构象,速度或荧光强度,测量带电分子,长度领域，能够解决光学系统空间分辨率有限、占据空间、不能小型化等问题

Inactive Publication Date: 2011-08-10
CORNELL UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In standard state, the device tends to take up space on an entire optical table, and many cannot be miniaturized, even in their most advanced and expensive models
This severely limits product designers who wish to create portable, low-cost "lab-on-a-chip"
Second, the spatial resolution provided by optical systems is limited

Method used

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  • Nanofluidic channels with integrated charge sensors and methods based thereon
  • Nanofluidic channels with integrated charge sensors and methods based thereon
  • Nanofluidic channels with integrated charge sensors and methods based thereon

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 2

[0396] 6.2 Example 2: Fabrication of Devices Comprising Nanofluidic Channels Integrated with Carbon Nanotubes

[0397] 6.2.1 Introduction

[0398] The electrical detectors described in Section 6.1 were fabricated by a combination of standard microelectromechanical (MEMS) processing techniques and carbon nanotube growth techniques known in the industry. This example describes a preferred implementation of fabricating a nanofluidic channel device integrated with a carbon nanotube sensor.

[0399] Section 6.3 describes the specific implementation of the fabrication method.

[0400] 6.2.2 Device characteristics

[0401] Based on the concept of using integrated carbon nanotubes to electrically detect charged DNA molecules in a nanofluidic channel as described in section 6.1, the electrical detector comprising a nanofluidic channel and a charge sensor integrated in a nanofluidic channel preferably has the following characteristics:

[0402] (1) The depth of the nanofluid channel ...

Embodiment 3

[0530] 6.3 Example 3: Detailed fabrication process of a device including nanofluidic channels integrated with carbon nanotubes

[0531] The following is an example of a manufacturing process, which is implemented based on the method of manufacturing an electrical detector described in Section 6.2 (Example 2).

[0532] Step 1: Fabricate the Alignment Layer

[0533] 1. Pretreatment:

[0534] a. Obtain three fused silica wafers with a diameter of 100 mm and a thickness of 170 microns. (Mark Optics) Wafer scar bright spot parameters should be equal to or less than 40 / 20, RMS surface roughness should be <20 Angstroms.

[0535] b. Use a diamond scribe to engrave the wafer number on the back of the wafer.

[0536] c. Clean the wafer with an automatic spin-rinse-dry machine.

[0537] 2. Photoresist preparation

[0538] a.p-20 adhesion promoter; centrifuge at 3000RPM, 5000R / S, 45 seconds

[0539] b.SPR 2203.0 photoresist; Centrifuge at 3000RPM, 5000R / S, 45 seconds

[0540] c. Ba...

Embodiment 5

[0760] 6.5 Example 5: Measurement of conformation, length and velocity of electrokinetic stretched DNA in nanochannels

[0761] 6.5.1 Summary

[0762] This example demonstrates a rapid and precise method for measuring the conformation, length, velocity and fluorescence intensity of a single DNA molecule confined in a nanochannel. DNA molecules are electrophoretically driven through the nanoslits into the nanochannels to constrain and dynamically elongate these DNA molecules beyond their equilibrium lengths, which are repeatedly measured by laser-induced fluorescence spectroscopy. A single-molecule analysis algorithm was developed to resolve the simulated fluorescence bursts and determine the folded conformation of each stretched molecule. The present technique has achieved a molecular length resolution of 114 nm and an analysis time of 20 ms / molecule, which enables sensitive measurements of multiple aspects of the physical behavior of DNA in nanochannels. Lambda phage DNA wa...

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Abstract

An electrical detector is provided that comprises a nanofluidic channel with an integrated nanoscale charge sensor. The charge sensor can be an unfunctionalized nanowire, nanotube, transistor or capacitor and can be of carbon, silicon, carbon / silicon or other semiconducting material. The nanofluidic channel depth is on the order of the Debye screening length. Methods are also provided for detecting charged molecules or biological or chemical species with the electrical detector. Charged molecules or species in solution are driven through the nanofluidic channel of the electrical detector and contact the charge sensor, thereby producing a detectable signal. Methods are also provided for detecting a local solution potential of interest.; A solution flowing through the nanofluidic channel of the electrical detector contacts the charge sensor, thereby producing a detectable local solution potential signal.

Description

[0001] related application [0002] This application claims priority to US Provisional Patent Application No. 61 / 080,170, filed July 11, 2008, entitled "Nanofluidic Channels Integrating Nanowires," the entire contents of which are incorporated herein by reference. [0003] Statement Regarding Federal Funding for Research and Development [0004] The disclosed invention was made with government support under Contract No. NSF987677 from the National Science Foundation, Contract No. NIH HG001506 from the National Institutes of Health, and Contract No. ECS-987677 under the National Science Foundation STC program. The government has rights in this invention. 1. Technical field [0005] The present invention relates to nanofluidic channels ("nanochannels") integrating charge sensors, which may be nanotubes, nanowires, transistors or capacitors. The invention also relates to methods of detecting biological or chemical species in nanofluidic channels using charge sensors. The prese...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/00G01N27/02G01N27/414B82B3/00G01N33/48C12Q1/68
CPCB82Y30/00G01N27/4473G01N33/48721G01N27/414B01L2300/0896B01L3/502761
Inventor J·T·曼尼安H·C·克莱格海德
Owner CORNELL UNIVERSITY
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