Non gamma - phase cubic AlCrO
A cubic phase, non-metal technology, applied in the field of non-γ-phase cubic AlCrO, can solve the problems of rough coating surface, narrow process window, infeasible and so on
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[0034] In order to produce the coating according to the invention, the workpiece is placed on a suitably provided double-rotatable or triple-rotatable support. The bracket is placed in a vacuum processing chamber, where the vacuum chamber is pumped to about 10 -4 Pressure of millibar.
[0035] In order to generate the process temperature supported by the radiant heater, a low-pressure arc (LVA) plasma is ignited in an argon-hydrogen atmosphere between the cathode chamber separated by the baffle plate containing the hot cathode and the anode workpiece.
[0036] Select the following heating parameters:
[0037] Discharge current (LVA) 250 A
[0038] Argon flow rate 50 sccm
[0039] Hydrogen flow 300sccm
[0040] Process pressure 1.4 Pa
[0041] Substrate temperature about 550 ℃
[0042] Process duration 45 min
[0043] Those skilled in the art will be familiar with possible alternatives. As a preference, the substrate is connected as the anode of the low-voltage arc and is also preferably p...
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