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Non gamma - phase cubic AlCrO

A cubic phase, non-metal technology, applied in the field of non-γ-phase cubic AlCrO, can solve the problems of rough coating surface, narrow process window, infeasible and so on

Active Publication Date: 2013-10-02
OERLIKON SURFACE SOLUTIONS AG PFAFFIKON
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, the use of the magnetron sputtering method is very complicated and industrially unfeasible due to the very narrow process window and low deposition rate
On the other hand, the cathodic arc evaporation provides a stable deposition rate, but increased droplet emission from the target results in a noticeably rough coating surface
Furthermore, even during cathodic arc deposition of oxide layers, the deposition rate is lower for nitride layers

Method used

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  • Non gamma - phase cubic AlCrO
  • Non gamma - phase cubic AlCrO
  • Non gamma - phase cubic AlCrO

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Embodiment Construction

[0034] In order to produce the coating according to the invention, the workpiece is placed on a suitably provided double-rotatable or triple-rotatable support. The bracket is placed in a vacuum processing chamber, where the vacuum chamber is pumped to about 10 -4 Pressure of millibar.

[0035] In order to generate the process temperature supported by the radiant heater, a low-pressure arc (LVA) plasma is ignited in an argon-hydrogen atmosphere between the cathode chamber separated by the baffle plate containing the hot cathode and the anode workpiece.

[0036] Select the following heating parameters:

[0037] Discharge current (LVA) 250 A

[0038] Argon flow rate 50 sccm

[0039] Hydrogen flow 300sccm

[0040] Process pressure 1.4 Pa

[0041] Substrate temperature about 550 ℃

[0042] Process duration 45 min

[0043] Those skilled in the art will be familiar with possible alternatives. As a preference, the substrate is connected as the anode of the low-voltage arc and is also preferably p...

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Abstract

The present invention relates to a coating for workpieces with at least one layer, the at least one layer comprising metal components represented by AlxCr1-x wherein x is an atomic ratio meeting 0@x@0.84 and comprising non metallic components represented by O1-yZy where Z is at least one Element selected from the group N, B, C and 0@y@0.65, preferably y@0.5 characterized in that the coating comprises at least partially a cubic non gamma Cr and oxide comprising phase in such a way that the x-ray diffraction pattern shows formation of cubic phase which is not the cubic phase of CrN.

Description

Technical field [0001] The invention relates to a physical vapor deposition (PVD)-based coating system for coating a workpiece, and to a method of manufacturing the corresponding coating. The invention further relates to workpieces coated with the coating system. Background technique [0002] The use of wear-resistant coatings is a well-known method to increase tool life. The coating is particularly helpful in improving surface hardness, thermal hardness, and resistance to frictional wear and chemical wear. In addition, the oxidation resistance and thermal stability of the working surface can be significantly improved. [0003] Because of their outstanding high temperature stability and chemical resistance, Al 2 O 3 Coatings have been used for the protection of cutting tool surfaces for many years. Al now available on the market 2 O 3 Most coatings are produced by chemical vapor deposition (CVD) at high temperatures. For example, according to US2004202877, α-Al 2 O 3 The deposi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C30/00B23B27/00B23B27/02B23B27/08B23B27/14
CPCC23C30/005C22F1/18C23C28/044C22C14/00C23C14/08C23C30/00C23C28/042C23C14/0676C23C14/32C23C2222/00
Inventor D.库拉波夫
Owner OERLIKON SURFACE SOLUTIONS AG PFAFFIKON